10/29/2012	9:22:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2012	9:22:07 AM	Recipe started at 9:22 AM
10/29/2012	9:22:07 AM	Helium valve closed
10/29/2012	9:22:07 AM	H2 valve closed
10/29/2012	9:22:07 AM	BCl3 valve closed
10/29/2012	9:22:07 AM	PH3 valve closed
10/29/2012	9:22:07 AM	SiCl4 pre valve closed
10/29/2012	9:22:07 AM	SiCl4 post valve closed
10/29/2012	9:22:07 AM	Main Vac valve closed
10/29/2012	9:22:07 AM	Bypass valve closed
10/29/2012	9:22:07 AM	Bubbler valve closed
10/29/2012	9:22:07 AM	Helium MFC set to  0.000000
10/29/2012	9:22:07 AM	H2 MFC set to  0.000000
10/29/2012	9:22:07 AM	BCl3 MFC set to  0.000000
10/29/2012	9:22:07 AM	PH3 MFC set to  0.000000
10/29/2012	9:22:07 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:22:07 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:22:07 AM	Tube furnace set to 0
10/29/2012	9:22:10 AM	H2 valve closed
10/29/2012	9:22:10 AM	BCl3 valve closed
10/29/2012	9:22:10 AM	PH3 valve closed
10/29/2012	9:22:10 AM	SiCl4 pre valve closed
10/29/2012	9:22:10 AM	SiCl4 post valve closed
10/29/2012	9:22:10 AM	Main Vac valve closed
10/29/2012	9:22:10 AM	Bypass valve closed
10/29/2012	9:22:10 AM	Bubbler valve closed
10/29/2012	9:22:10 AM	Helium valve opened
10/29/2012	9:22:10 AM	Helium MFC set to  500.000000
10/29/2012	9:22:10 AM	H2 MFC set to  0.000000
10/29/2012	9:22:10 AM	BCl3 MFC set to  0.000000
10/29/2012	9:22:10 AM	PH3 MFC set to  0.000000
10/29/2012	9:22:10 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:22:10 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:22:10 AM	Tube furnace set to 0
10/29/2012	9:23:23 AM	Helium valve closed
10/29/2012	9:23:23 AM	H2 valve closed
10/29/2012	9:23:23 AM	BCl3 valve closed
10/29/2012	9:23:23 AM	PH3 valve closed
10/29/2012	9:23:23 AM	SiCl4 pre valve closed
10/29/2012	9:23:23 AM	SiCl4 post valve closed
10/29/2012	9:23:23 AM	Main Vac valve closed
10/29/2012	9:23:23 AM	Bypass valve closed
10/29/2012	9:23:23 AM	Bubbler valve closed
10/29/2012	9:23:23 AM	Helium MFC set to  0.000000
10/29/2012	9:23:23 AM	H2 MFC set to  0.000000
10/29/2012	9:23:23 AM	BCl3 MFC set to  0.000000
10/29/2012	9:23:23 AM	PH3 MFC set to  0.000000
10/29/2012	9:23:23 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:23:23 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:23:23 AM	Tube furnace set to 0
10/29/2012	9:23:24 AM	Run finished at 9:23 AM
10/29/2012	9:23:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2012	9:26:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2012	9:26:38 AM	Recipe started at 9:26 AM
10/29/2012	9:26:38 AM	Helium valve closed
10/29/2012	9:26:38 AM	H2 valve closed
10/29/2012	9:26:38 AM	BCl3 valve closed
10/29/2012	9:26:38 AM	PH3 valve closed
10/29/2012	9:26:38 AM	SiCl4 pre valve closed
10/29/2012	9:26:38 AM	SiCl4 post valve closed
10/29/2012	9:26:38 AM	Main Vac valve closed
10/29/2012	9:26:38 AM	Bubbler valve closed
10/29/2012	9:26:38 AM	Bypass valve opened
10/29/2012	9:26:38 AM	Helium MFC set to  0.000000
10/29/2012	9:26:38 AM	H2 MFC set to  0.000000
10/29/2012	9:26:38 AM	BCl3 MFC set to  0.000000
10/29/2012	9:26:38 AM	PH3 MFC set to  0.000000
10/29/2012	9:26:38 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:26:38 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:26:38 AM	Tube furnace set to 0
10/29/2012	9:28:00 AM	Helium valve closed
10/29/2012	9:28:00 AM	H2 valve closed
10/29/2012	9:28:00 AM	BCl3 valve closed
10/29/2012	9:28:00 AM	PH3 valve closed
10/29/2012	9:28:00 AM	SiCl4 pre valve closed
10/29/2012	9:28:00 AM	SiCl4 post valve closed
10/29/2012	9:28:00 AM	Main Vac valve closed
10/29/2012	9:28:00 AM	Bubbler valve closed
10/29/2012	9:28:00 AM	Bypass valve opened
10/29/2012	9:28:00 AM	Helium MFC set to  0.000000
10/29/2012	9:28:00 AM	H2 MFC set to  0.000000
10/29/2012	9:28:00 AM	BCl3 MFC set to  0.000000
10/29/2012	9:28:00 AM	PH3 MFC set to  0.000000
10/29/2012	9:28:00 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:28:00 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:28:01 AM	Tube furnace set to 0
10/29/2012	9:29:01 AM	Helium valve closed
10/29/2012	9:29:01 AM	H2 valve closed
10/29/2012	9:29:01 AM	BCl3 valve closed
10/29/2012	9:29:01 AM	PH3 valve closed
10/29/2012	9:29:01 AM	SiCl4 pre valve closed
10/29/2012	9:29:01 AM	SiCl4 post valve closed
10/29/2012	9:29:01 AM	Bypass valve closed
10/29/2012	9:29:01 AM	Bubbler valve closed
10/29/2012	9:29:01 AM	Main Vac valve opened
10/29/2012	9:29:01 AM	Helium MFC set to  0.000000
10/29/2012	9:29:01 AM	H2 MFC set to  0.000000
10/29/2012	9:29:01 AM	BCl3 MFC set to  0.000000
10/29/2012	9:29:01 AM	PH3 MFC set to  0.000000
10/29/2012	9:29:01 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:29:01 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:29:01 AM	Tube furnace set to 0
10/29/2012	9:29:02 AM	Run finished at 9:29 AM
10/29/2012	9:29:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2012	9:29:10 AM	Tube furnace set to 150
10/29/2012	9:47:49 AM	Main Vac valve closed
10/29/2012	9:48:10 AM	Main Vac valve opened
10/29/2012	9:48:54 AM	Main Vac valve closed
10/29/2012	9:49:03 AM	Main Vac valve opened
10/29/2012	9:49:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2012	9:49:35 AM	Recipe started at 9:49 AM
10/29/2012	9:49:35 AM	Helium valve closed
10/29/2012	9:49:35 AM	H2 valve closed
10/29/2012	9:49:35 AM	BCl3 valve closed
10/29/2012	9:49:35 AM	PH3 valve closed
10/29/2012	9:49:35 AM	SiCl4 pre valve closed
10/29/2012	9:49:35 AM	SiCl4 post valve closed
10/29/2012	9:49:35 AM	Main Vac valve closed
10/29/2012	9:49:35 AM	Bubbler valve closed
10/29/2012	9:49:35 AM	Bypass valve opened
10/29/2012	9:49:35 AM	Helium MFC set to  0.000000
10/29/2012	9:49:35 AM	H2 MFC set to  0.000000
10/29/2012	9:49:35 AM	BCl3 MFC set to  0.000000
10/29/2012	9:49:35 AM	PH3 MFC set to  0.000000
10/29/2012	9:49:35 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:49:35 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:49:36 AM	Tube furnace set to 0
10/29/2012	9:49:36 AM	Run aborted at 9:49 AM
10/29/2012	9:49:36 AM	Helium valve closed
10/29/2012	9:49:36 AM	H2 valve closed
10/29/2012	9:49:36 AM	BCl3 valve closed
10/29/2012	9:49:36 AM	PH3 valve closed
10/29/2012	9:49:36 AM	SiCl4 pre valve closed
10/29/2012	9:49:36 AM	SiCl4 post valve closed
10/29/2012	9:49:36 AM	Bypass valve closed
10/29/2012	9:49:36 AM	Main Vac valve closed
10/29/2012	9:49:36 AM	Bubbler valve closed
10/29/2012	9:49:36 AM	Helium MFC set to  0.000000
10/29/2012	9:49:36 AM	H2 MFC set to  0.000000
10/29/2012	9:49:36 AM	BCl3 MFC set to  0.000000
10/29/2012	9:49:36 AM	PH3 MFC set to  0.000000
10/29/2012	9:49:36 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:49:36 AM	Tube furnace set to 0
10/29/2012	9:49:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/29/2012	9:49:40 AM	Main Vac valve opened
10/29/2012	9:50:13 AM	Recipe started at 9:50 AM
10/29/2012	9:50:13 AM	Helium valve closed
10/29/2012	9:50:13 AM	H2 valve closed
10/29/2012	9:50:13 AM	BCl3 valve closed
10/29/2012	9:50:13 AM	PH3 valve closed
10/29/2012	9:50:13 AM	SiCl4 pre valve closed
10/29/2012	9:50:13 AM	SiCl4 post valve closed
10/29/2012	9:50:13 AM	Bypass valve closed
10/29/2012	9:50:13 AM	Bubbler valve closed
10/29/2012	9:50:13 AM	Main Vac valve opened
10/29/2012	9:50:13 AM	Helium MFC set to  0.000000
10/29/2012	9:50:13 AM	H2 MFC set to  0.000000
10/29/2012	9:50:13 AM	BCl3 MFC set to  0.000000
10/29/2012	9:50:13 AM	PH3 MFC set to  0.000000
10/29/2012	9:50:13 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:50:13 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:50:13 AM	Tube furnace set to 0
10/29/2012	9:50:43 AM	H2 valve closed
10/29/2012	9:50:43 AM	BCl3 valve closed
10/29/2012	9:50:43 AM	PH3 valve closed
10/29/2012	9:50:43 AM	SiCl4 pre valve closed
10/29/2012	9:50:43 AM	SiCl4 post valve closed
10/29/2012	9:50:43 AM	Bypass valve closed
10/29/2012	9:50:43 AM	Bubbler valve closed
10/29/2012	9:50:43 AM	Helium valve opened
10/29/2012	9:50:43 AM	Main Vac valve opened
10/29/2012	9:50:43 AM	Helium MFC set to  20.000000
10/29/2012	9:50:43 AM	H2 MFC set to  0.000000
10/29/2012	9:50:43 AM	BCl3 MFC set to  0.000000
10/29/2012	9:50:43 AM	PH3 MFC set to  0.000000
10/29/2012	9:50:43 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:50:43 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:50:43 AM	Tube furnace set to 0
10/29/2012	9:51:13 AM	Helium valve closed
10/29/2012	9:51:13 AM	H2 valve closed
10/29/2012	9:51:13 AM	BCl3 valve closed
10/29/2012	9:51:13 AM	PH3 valve closed
10/29/2012	9:51:13 AM	SiCl4 pre valve closed
10/29/2012	9:51:13 AM	SiCl4 post valve closed
10/29/2012	9:51:13 AM	Bypass valve closed
10/29/2012	9:51:13 AM	Bubbler valve closed
10/29/2012	9:51:13 AM	Main Vac valve opened
10/29/2012	9:51:13 AM	Helium MFC set to  0.000000
10/29/2012	9:51:13 AM	H2 MFC set to  0.000000
10/29/2012	9:51:13 AM	BCl3 MFC set to  0.000000
10/29/2012	9:51:14 AM	PH3 MFC set to  0.000000
10/29/2012	9:51:14 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:51:14 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:51:14 AM	Tube furnace set to 0
10/29/2012	9:51:44 AM	H2 valve closed
10/29/2012	9:51:44 AM	BCl3 valve closed
10/29/2012	9:51:44 AM	PH3 valve closed
10/29/2012	9:51:44 AM	SiCl4 pre valve closed
10/29/2012	9:51:44 AM	SiCl4 post valve closed
10/29/2012	9:51:44 AM	Bypass valve closed
10/29/2012	9:51:44 AM	Bubbler valve closed
10/29/2012	9:51:44 AM	Helium valve opened
10/29/2012	9:51:44 AM	Main Vac valve opened
10/29/2012	9:51:44 AM	Helium MFC set to  20.000000
10/29/2012	9:51:44 AM	H2 MFC set to  0.000000
10/29/2012	9:51:44 AM	BCl3 MFC set to  0.000000
10/29/2012	9:51:44 AM	PH3 MFC set to  0.000000
10/29/2012	9:51:44 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:51:44 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:51:44 AM	Tube furnace set to 0
10/29/2012	9:52:14 AM	Helium valve closed
10/29/2012	9:52:14 AM	H2 valve closed
10/29/2012	9:52:14 AM	BCl3 valve closed
10/29/2012	9:52:14 AM	PH3 valve closed
10/29/2012	9:52:14 AM	SiCl4 pre valve closed
10/29/2012	9:52:14 AM	SiCl4 post valve closed
10/29/2012	9:52:14 AM	Bypass valve closed
10/29/2012	9:52:14 AM	Bubbler valve closed
10/29/2012	9:52:14 AM	Main Vac valve opened
10/29/2012	9:52:14 AM	Helium MFC set to  0.000000
10/29/2012	9:52:14 AM	H2 MFC set to  0.000000
10/29/2012	9:52:14 AM	BCl3 MFC set to  0.000000
10/29/2012	9:52:14 AM	PH3 MFC set to  0.000000
10/29/2012	9:52:14 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:52:14 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:52:14 AM	Tube furnace set to 0
10/29/2012	9:52:44 AM	H2 valve closed
10/29/2012	9:52:44 AM	BCl3 valve closed
10/29/2012	9:52:44 AM	PH3 valve closed
10/29/2012	9:52:44 AM	SiCl4 pre valve closed
10/29/2012	9:52:44 AM	SiCl4 post valve closed
10/29/2012	9:52:44 AM	Bypass valve closed
10/29/2012	9:52:44 AM	Bubbler valve closed
10/29/2012	9:52:44 AM	Helium valve opened
10/29/2012	9:52:44 AM	Main Vac valve opened
10/29/2012	9:52:44 AM	Helium MFC set to  20.000000
10/29/2012	9:52:44 AM	H2 MFC set to  0.000000
10/29/2012	9:52:44 AM	BCl3 MFC set to  0.000000
10/29/2012	9:52:44 AM	PH3 MFC set to  0.000000
10/29/2012	9:52:44 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:52:44 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:52:44 AM	Tube furnace set to 0
10/29/2012	9:53:14 AM	Helium valve closed
10/29/2012	9:53:14 AM	H2 valve closed
10/29/2012	9:53:14 AM	BCl3 valve closed
10/29/2012	9:53:14 AM	PH3 valve closed
10/29/2012	9:53:14 AM	SiCl4 pre valve closed
10/29/2012	9:53:14 AM	SiCl4 post valve closed
10/29/2012	9:53:14 AM	Bypass valve closed
10/29/2012	9:53:14 AM	Bubbler valve closed
10/29/2012	9:53:14 AM	Main Vac valve opened
10/29/2012	9:53:14 AM	Helium MFC set to  0.000000
10/29/2012	9:53:14 AM	H2 MFC set to  0.000000
10/29/2012	9:53:14 AM	BCl3 MFC set to  0.000000
10/29/2012	9:53:14 AM	PH3 MFC set to  0.000000
10/29/2012	9:53:14 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:53:14 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:53:15 AM	Tube furnace set to 0
10/29/2012	9:53:45 AM	H2 valve closed
10/29/2012	9:53:45 AM	BCl3 valve closed
10/29/2012	9:53:45 AM	PH3 valve closed
10/29/2012	9:53:45 AM	SiCl4 pre valve closed
10/29/2012	9:53:45 AM	SiCl4 post valve closed
10/29/2012	9:53:45 AM	Bypass valve closed
10/29/2012	9:53:45 AM	Bubbler valve closed
10/29/2012	9:53:45 AM	Helium valve opened
10/29/2012	9:53:45 AM	Main Vac valve opened
10/29/2012	9:53:45 AM	Helium MFC set to  20.000000
10/29/2012	9:53:45 AM	H2 MFC set to  0.000000
10/29/2012	9:53:45 AM	BCl3 MFC set to  0.000000
10/29/2012	9:53:45 AM	PH3 MFC set to  0.000000
10/29/2012	9:53:45 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:53:45 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:53:45 AM	Tube furnace set to 0
10/29/2012	9:54:15 AM	Helium valve closed
10/29/2012	9:54:15 AM	H2 valve closed
10/29/2012	9:54:15 AM	BCl3 valve closed
10/29/2012	9:54:15 AM	PH3 valve closed
10/29/2012	9:54:15 AM	SiCl4 pre valve closed
10/29/2012	9:54:15 AM	SiCl4 post valve closed
10/29/2012	9:54:15 AM	Bypass valve closed
10/29/2012	9:54:15 AM	Bubbler valve closed
10/29/2012	9:54:15 AM	Main Vac valve opened
10/29/2012	9:54:15 AM	Helium MFC set to  0.000000
10/29/2012	9:54:15 AM	H2 MFC set to  0.000000
10/29/2012	9:54:15 AM	BCl3 MFC set to  0.000000
10/29/2012	9:54:15 AM	PH3 MFC set to  0.000000
10/29/2012	9:54:15 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:54:15 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:54:15 AM	Tube furnace set to 0
10/29/2012	9:54:45 AM	H2 valve closed
10/29/2012	9:54:45 AM	BCl3 valve closed
10/29/2012	9:54:45 AM	PH3 valve closed
10/29/2012	9:54:45 AM	SiCl4 pre valve closed
10/29/2012	9:54:45 AM	SiCl4 post valve closed
10/29/2012	9:54:45 AM	Bypass valve closed
10/29/2012	9:54:45 AM	Bubbler valve closed
10/29/2012	9:54:45 AM	Helium valve opened
10/29/2012	9:54:45 AM	Main Vac valve opened
10/29/2012	9:54:45 AM	Helium MFC set to  20.000000
10/29/2012	9:54:45 AM	H2 MFC set to  0.000000
10/29/2012	9:54:45 AM	BCl3 MFC set to  0.000000
10/29/2012	9:54:45 AM	PH3 MFC set to  0.000000
10/29/2012	9:54:45 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:54:45 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:54:45 AM	Tube furnace set to 0
10/29/2012	9:55:15 AM	Helium valve closed
10/29/2012	9:55:15 AM	H2 valve closed
10/29/2012	9:55:15 AM	BCl3 valve closed
10/29/2012	9:55:15 AM	PH3 valve closed
10/29/2012	9:55:15 AM	SiCl4 pre valve closed
10/29/2012	9:55:15 AM	SiCl4 post valve closed
10/29/2012	9:55:15 AM	Bypass valve closed
10/29/2012	9:55:15 AM	Bubbler valve closed
10/29/2012	9:55:15 AM	Main Vac valve opened
10/29/2012	9:55:15 AM	Helium MFC set to  0.000000
10/29/2012	9:55:15 AM	H2 MFC set to  0.000000
10/29/2012	9:55:15 AM	BCl3 MFC set to  0.000000
10/29/2012	9:55:15 AM	PH3 MFC set to  0.000000
10/29/2012	9:55:15 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:55:15 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:55:16 AM	Tube furnace set to 0
10/29/2012	9:55:46 AM	H2 valve closed
10/29/2012	9:55:46 AM	BCl3 valve closed
10/29/2012	9:55:46 AM	PH3 valve closed
10/29/2012	9:55:46 AM	SiCl4 pre valve closed
10/29/2012	9:55:46 AM	SiCl4 post valve closed
10/29/2012	9:55:46 AM	Bypass valve closed
10/29/2012	9:55:46 AM	Bubbler valve closed
10/29/2012	9:55:46 AM	Helium valve opened
10/29/2012	9:55:46 AM	Main Vac valve opened
10/29/2012	9:55:46 AM	Helium MFC set to  20.000000
10/29/2012	9:55:46 AM	H2 MFC set to  0.000000
10/29/2012	9:55:46 AM	BCl3 MFC set to  0.000000
10/29/2012	9:55:46 AM	PH3 MFC set to  0.000000
10/29/2012	9:55:46 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:55:46 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:55:46 AM	Tube furnace set to 0
10/29/2012	9:56:16 AM	Helium valve closed
10/29/2012	9:56:16 AM	H2 valve closed
10/29/2012	9:56:16 AM	BCl3 valve closed
10/29/2012	9:56:16 AM	PH3 valve closed
10/29/2012	9:56:16 AM	SiCl4 pre valve closed
10/29/2012	9:56:16 AM	SiCl4 post valve closed
10/29/2012	9:56:16 AM	Bypass valve closed
10/29/2012	9:56:16 AM	Bubbler valve closed
10/29/2012	9:56:16 AM	Main Vac valve opened
10/29/2012	9:56:16 AM	Helium MFC set to  0.000000
10/29/2012	9:56:16 AM	H2 MFC set to  0.000000
10/29/2012	9:56:16 AM	BCl3 MFC set to  0.000000
10/29/2012	9:56:16 AM	PH3 MFC set to  0.000000
10/29/2012	9:56:16 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:56:16 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:56:16 AM	Tube furnace set to 0
10/29/2012	9:56:46 AM	H2 valve closed
10/29/2012	9:56:46 AM	BCl3 valve closed
10/29/2012	9:56:46 AM	PH3 valve closed
10/29/2012	9:56:46 AM	SiCl4 pre valve closed
10/29/2012	9:56:46 AM	SiCl4 post valve closed
10/29/2012	9:56:46 AM	Bypass valve closed
10/29/2012	9:56:46 AM	Bubbler valve closed
10/29/2012	9:56:46 AM	Helium valve opened
10/29/2012	9:56:46 AM	Main Vac valve opened
10/29/2012	9:56:46 AM	Helium MFC set to  20.000000
10/29/2012	9:56:46 AM	H2 MFC set to  0.000000
10/29/2012	9:56:46 AM	BCl3 MFC set to  0.000000
10/29/2012	9:56:46 AM	PH3 MFC set to  0.000000
10/29/2012	9:56:46 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:56:46 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:56:46 AM	Tube furnace set to 0
10/29/2012	9:57:16 AM	Helium valve closed
10/29/2012	9:57:16 AM	H2 valve closed
10/29/2012	9:57:16 AM	BCl3 valve closed
10/29/2012	9:57:16 AM	PH3 valve closed
10/29/2012	9:57:16 AM	SiCl4 pre valve closed
10/29/2012	9:57:16 AM	SiCl4 post valve closed
10/29/2012	9:57:16 AM	Bypass valve closed
10/29/2012	9:57:16 AM	Bubbler valve closed
10/29/2012	9:57:16 AM	Main Vac valve opened
10/29/2012	9:57:16 AM	Helium MFC set to  0.000000
10/29/2012	9:57:16 AM	H2 MFC set to  0.000000
10/29/2012	9:57:16 AM	BCl3 MFC set to  0.000000
10/29/2012	9:57:16 AM	PH3 MFC set to  0.000000
10/29/2012	9:57:16 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:57:16 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:57:17 AM	Tube furnace set to 0
10/29/2012	9:57:47 AM	H2 valve closed
10/29/2012	9:57:47 AM	BCl3 valve closed
10/29/2012	9:57:47 AM	PH3 valve closed
10/29/2012	9:57:47 AM	SiCl4 pre valve closed
10/29/2012	9:57:47 AM	SiCl4 post valve closed
10/29/2012	9:57:47 AM	Bypass valve closed
10/29/2012	9:57:47 AM	Bubbler valve closed
10/29/2012	9:57:47 AM	Helium valve opened
10/29/2012	9:57:47 AM	Main Vac valve opened
10/29/2012	9:57:47 AM	Helium MFC set to  20.000000
10/29/2012	9:57:47 AM	H2 MFC set to  0.000000
10/29/2012	9:57:47 AM	BCl3 MFC set to  0.000000
10/29/2012	9:57:47 AM	PH3 MFC set to  0.000000
10/29/2012	9:57:47 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:57:47 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:57:47 AM	Tube furnace set to 0
10/29/2012	9:58:17 AM	Helium valve closed
10/29/2012	9:58:17 AM	H2 valve closed
10/29/2012	9:58:17 AM	BCl3 valve closed
10/29/2012	9:58:17 AM	PH3 valve closed
10/29/2012	9:58:17 AM	SiCl4 pre valve closed
10/29/2012	9:58:17 AM	SiCl4 post valve closed
10/29/2012	9:58:17 AM	Bypass valve closed
10/29/2012	9:58:17 AM	Bubbler valve closed
10/29/2012	9:58:17 AM	Main Vac valve opened
10/29/2012	9:58:17 AM	Helium MFC set to  0.000000
10/29/2012	9:58:17 AM	H2 MFC set to  0.000000
10/29/2012	9:58:17 AM	BCl3 MFC set to  0.000000
10/29/2012	9:58:17 AM	PH3 MFC set to  0.000000
10/29/2012	9:58:17 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:58:17 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:58:17 AM	Tube furnace set to 0
10/29/2012	9:58:47 AM	H2 valve closed
10/29/2012	9:58:47 AM	BCl3 valve closed
10/29/2012	9:58:47 AM	PH3 valve closed
10/29/2012	9:58:47 AM	SiCl4 pre valve closed
10/29/2012	9:58:47 AM	SiCl4 post valve closed
10/29/2012	9:58:47 AM	Bypass valve closed
10/29/2012	9:58:47 AM	Bubbler valve closed
10/29/2012	9:58:47 AM	Helium valve opened
10/29/2012	9:58:47 AM	Main Vac valve opened
10/29/2012	9:58:47 AM	Helium MFC set to  20.000000
10/29/2012	9:58:47 AM	H2 MFC set to  0.000000
10/29/2012	9:58:47 AM	BCl3 MFC set to  0.000000
10/29/2012	9:58:47 AM	PH3 MFC set to  0.000000
10/29/2012	9:58:47 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:58:47 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:58:47 AM	Tube furnace set to 0
10/29/2012	9:59:17 AM	Helium valve closed
10/29/2012	9:59:17 AM	H2 valve closed
10/29/2012	9:59:17 AM	BCl3 valve closed
10/29/2012	9:59:17 AM	PH3 valve closed
10/29/2012	9:59:17 AM	SiCl4 pre valve closed
10/29/2012	9:59:17 AM	SiCl4 post valve closed
10/29/2012	9:59:17 AM	Bypass valve closed
10/29/2012	9:59:17 AM	Bubbler valve closed
10/29/2012	9:59:17 AM	Main Vac valve opened
10/29/2012	9:59:17 AM	Helium MFC set to  0.000000
10/29/2012	9:59:17 AM	H2 MFC set to  0.000000
10/29/2012	9:59:17 AM	BCl3 MFC set to  0.000000
10/29/2012	9:59:17 AM	PH3 MFC set to  0.000000
10/29/2012	9:59:17 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:59:17 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:59:18 AM	Tube furnace set to 200
10/29/2012	9:59:48 AM	H2 valve closed
10/29/2012	9:59:48 AM	BCl3 valve closed
10/29/2012	9:59:48 AM	PH3 valve closed
10/29/2012	9:59:48 AM	SiCl4 pre valve closed
10/29/2012	9:59:48 AM	SiCl4 post valve closed
10/29/2012	9:59:48 AM	Bypass valve closed
10/29/2012	9:59:48 AM	Bubbler valve closed
10/29/2012	9:59:48 AM	Helium valve opened
10/29/2012	9:59:48 AM	Main Vac valve opened
10/29/2012	9:59:48 AM	Helium MFC set to  20.000000
10/29/2012	9:59:48 AM	H2 MFC set to  0.000000
10/29/2012	9:59:48 AM	BCl3 MFC set to  0.000000
10/29/2012	9:59:48 AM	PH3 MFC set to  0.000000
10/29/2012	9:59:48 AM	SiCl4 MFC set to  0.000000
10/29/2012	9:59:48 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	9:59:48 AM	Tube furnace set to 200
10/29/2012	10:00:18 AM	Helium valve closed
10/29/2012	10:00:18 AM	H2 valve closed
10/29/2012	10:00:18 AM	BCl3 valve closed
10/29/2012	10:00:18 AM	PH3 valve closed
10/29/2012	10:00:18 AM	SiCl4 pre valve closed
10/29/2012	10:00:18 AM	SiCl4 post valve closed
10/29/2012	10:00:18 AM	Bypass valve closed
10/29/2012	10:00:18 AM	Bubbler valve closed
10/29/2012	10:00:18 AM	Main Vac valve opened
10/29/2012	10:00:18 AM	Helium MFC set to  0.000000
10/29/2012	10:00:18 AM	H2 MFC set to  0.000000
10/29/2012	10:00:18 AM	BCl3 MFC set to  0.000000
10/29/2012	10:00:18 AM	PH3 MFC set to  0.000000
10/29/2012	10:00:18 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:00:18 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:00:18 AM	Tube furnace set to 200
10/29/2012	10:00:48 AM	H2 valve closed
10/29/2012	10:00:48 AM	BCl3 valve closed
10/29/2012	10:00:48 AM	PH3 valve closed
10/29/2012	10:00:48 AM	SiCl4 pre valve closed
10/29/2012	10:00:48 AM	SiCl4 post valve closed
10/29/2012	10:00:48 AM	Bypass valve closed
10/29/2012	10:00:48 AM	Bubbler valve closed
10/29/2012	10:00:48 AM	Helium valve opened
10/29/2012	10:00:48 AM	Main Vac valve opened
10/29/2012	10:00:48 AM	Helium MFC set to  20.000000
10/29/2012	10:00:48 AM	H2 MFC set to  0.000000
10/29/2012	10:00:48 AM	BCl3 MFC set to  0.000000
10/29/2012	10:00:48 AM	PH3 MFC set to  0.000000
10/29/2012	10:00:48 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:00:48 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:00:48 AM	Tube furnace set to 200
10/29/2012	10:01:18 AM	Helium valve closed
10/29/2012	10:01:18 AM	H2 valve closed
10/29/2012	10:01:18 AM	BCl3 valve closed
10/29/2012	10:01:18 AM	PH3 valve closed
10/29/2012	10:01:18 AM	SiCl4 pre valve closed
10/29/2012	10:01:18 AM	SiCl4 post valve closed
10/29/2012	10:01:18 AM	Bypass valve closed
10/29/2012	10:01:18 AM	Bubbler valve closed
10/29/2012	10:01:18 AM	Main Vac valve opened
10/29/2012	10:01:18 AM	Helium MFC set to  0.000000
10/29/2012	10:01:18 AM	H2 MFC set to  0.000000
10/29/2012	10:01:18 AM	BCl3 MFC set to  0.000000
10/29/2012	10:01:18 AM	PH3 MFC set to  0.000000
10/29/2012	10:01:18 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:01:18 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:01:19 AM	Tube furnace set to 200
10/29/2012	10:01:49 AM	H2 valve closed
10/29/2012	10:01:49 AM	BCl3 valve closed
10/29/2012	10:01:49 AM	PH3 valve closed
10/29/2012	10:01:49 AM	SiCl4 pre valve closed
10/29/2012	10:01:49 AM	SiCl4 post valve closed
10/29/2012	10:01:49 AM	Bypass valve closed
10/29/2012	10:01:49 AM	Bubbler valve closed
10/29/2012	10:01:49 AM	Helium valve opened
10/29/2012	10:01:49 AM	Main Vac valve opened
10/29/2012	10:01:49 AM	Helium MFC set to  20.000000
10/29/2012	10:01:49 AM	H2 MFC set to  0.000000
10/29/2012	10:01:49 AM	BCl3 MFC set to  0.000000
10/29/2012	10:01:49 AM	PH3 MFC set to  0.000000
10/29/2012	10:01:49 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:01:49 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:01:49 AM	Tube furnace set to 200
10/29/2012	10:02:19 AM	Helium valve closed
10/29/2012	10:02:19 AM	H2 valve closed
10/29/2012	10:02:19 AM	BCl3 valve closed
10/29/2012	10:02:19 AM	PH3 valve closed
10/29/2012	10:02:19 AM	SiCl4 pre valve closed
10/29/2012	10:02:19 AM	SiCl4 post valve closed
10/29/2012	10:02:19 AM	Bypass valve closed
10/29/2012	10:02:19 AM	Bubbler valve closed
10/29/2012	10:02:19 AM	Main Vac valve opened
10/29/2012	10:02:19 AM	Helium MFC set to  0.000000
10/29/2012	10:02:19 AM	H2 MFC set to  0.000000
10/29/2012	10:02:19 AM	BCl3 MFC set to  0.000000
10/29/2012	10:02:19 AM	PH3 MFC set to  0.000000
10/29/2012	10:02:19 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:02:19 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:02:19 AM	Tube furnace set to 200
10/29/2012	10:02:49 AM	H2 valve closed
10/29/2012	10:02:49 AM	BCl3 valve closed
10/29/2012	10:02:49 AM	PH3 valve closed
10/29/2012	10:02:49 AM	SiCl4 pre valve closed
10/29/2012	10:02:49 AM	SiCl4 post valve closed
10/29/2012	10:02:49 AM	Bypass valve closed
10/29/2012	10:02:49 AM	Bubbler valve closed
10/29/2012	10:02:49 AM	Helium valve opened
10/29/2012	10:02:49 AM	Main Vac valve opened
10/29/2012	10:02:49 AM	Helium MFC set to  20.000000
10/29/2012	10:02:49 AM	H2 MFC set to  0.000000
10/29/2012	10:02:49 AM	BCl3 MFC set to  0.000000
10/29/2012	10:02:49 AM	PH3 MFC set to  0.000000
10/29/2012	10:02:49 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:02:49 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:02:49 AM	Tube furnace set to 200
10/29/2012	10:03:19 AM	Helium valve closed
10/29/2012	10:03:19 AM	H2 valve closed
10/29/2012	10:03:19 AM	BCl3 valve closed
10/29/2012	10:03:19 AM	PH3 valve closed
10/29/2012	10:03:19 AM	SiCl4 pre valve closed
10/29/2012	10:03:19 AM	SiCl4 post valve closed
10/29/2012	10:03:19 AM	Bypass valve closed
10/29/2012	10:03:19 AM	Bubbler valve closed
10/29/2012	10:03:19 AM	Main Vac valve opened
10/29/2012	10:03:19 AM	Helium MFC set to  0.000000
10/29/2012	10:03:19 AM	H2 MFC set to  0.000000
10/29/2012	10:03:19 AM	BCl3 MFC set to  0.000000
10/29/2012	10:03:19 AM	PH3 MFC set to  0.000000
10/29/2012	10:03:19 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:03:19 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:03:20 AM	Tube furnace set to 200
10/29/2012	10:03:50 AM	H2 valve closed
10/29/2012	10:03:50 AM	BCl3 valve closed
10/29/2012	10:03:50 AM	PH3 valve closed
10/29/2012	10:03:50 AM	SiCl4 pre valve closed
10/29/2012	10:03:50 AM	SiCl4 post valve closed
10/29/2012	10:03:50 AM	Bypass valve closed
10/29/2012	10:03:50 AM	Bubbler valve closed
10/29/2012	10:03:50 AM	Helium valve opened
10/29/2012	10:03:50 AM	Main Vac valve opened
10/29/2012	10:03:50 AM	Helium MFC set to  20.000000
10/29/2012	10:03:50 AM	H2 MFC set to  0.000000
10/29/2012	10:03:50 AM	BCl3 MFC set to  0.000000
10/29/2012	10:03:50 AM	PH3 MFC set to  0.000000
10/29/2012	10:03:50 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:03:50 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:03:50 AM	Tube furnace set to 200
10/29/2012	10:04:20 AM	Helium valve closed
10/29/2012	10:04:20 AM	H2 valve closed
10/29/2012	10:04:20 AM	BCl3 valve closed
10/29/2012	10:04:20 AM	PH3 valve closed
10/29/2012	10:04:20 AM	SiCl4 pre valve closed
10/29/2012	10:04:20 AM	SiCl4 post valve closed
10/29/2012	10:04:20 AM	Bypass valve closed
10/29/2012	10:04:20 AM	Bubbler valve closed
10/29/2012	10:04:20 AM	Main Vac valve opened
10/29/2012	10:04:20 AM	Helium MFC set to  0.000000
10/29/2012	10:04:20 AM	H2 MFC set to  0.000000
10/29/2012	10:04:20 AM	BCl3 MFC set to  0.000000
10/29/2012	10:04:20 AM	PH3 MFC set to  0.000000
10/29/2012	10:04:20 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:04:20 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:04:20 AM	Tube furnace set to 200
10/29/2012	10:04:50 AM	H2 valve closed
10/29/2012	10:04:50 AM	BCl3 valve closed
10/29/2012	10:04:50 AM	PH3 valve closed
10/29/2012	10:04:50 AM	SiCl4 pre valve closed
10/29/2012	10:04:50 AM	SiCl4 post valve closed
10/29/2012	10:04:50 AM	Bypass valve closed
10/29/2012	10:04:50 AM	Bubbler valve closed
10/29/2012	10:04:50 AM	Helium valve opened
10/29/2012	10:04:50 AM	Main Vac valve opened
10/29/2012	10:04:50 AM	Helium MFC set to  20.000000
10/29/2012	10:04:50 AM	H2 MFC set to  0.000000
10/29/2012	10:04:50 AM	BCl3 MFC set to  0.000000
10/29/2012	10:04:50 AM	PH3 MFC set to  0.000000
10/29/2012	10:04:50 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:04:50 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:04:50 AM	Tube furnace set to 200
10/29/2012	10:05:20 AM	Helium valve closed
10/29/2012	10:05:20 AM	H2 valve closed
10/29/2012	10:05:20 AM	BCl3 valve closed
10/29/2012	10:05:20 AM	PH3 valve closed
10/29/2012	10:05:20 AM	SiCl4 pre valve closed
10/29/2012	10:05:20 AM	SiCl4 post valve closed
10/29/2012	10:05:20 AM	Bypass valve closed
10/29/2012	10:05:20 AM	Bubbler valve closed
10/29/2012	10:05:20 AM	Main Vac valve opened
10/29/2012	10:05:20 AM	Helium MFC set to  0.000000
10/29/2012	10:05:20 AM	H2 MFC set to  0.000000
10/29/2012	10:05:20 AM	BCl3 MFC set to  0.000000
10/29/2012	10:05:20 AM	PH3 MFC set to  0.000000
10/29/2012	10:05:20 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:05:20 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:05:21 AM	Tube furnace set to 0
10/29/2012	10:05:22 AM	Run finished at 10:05 AM
10/29/2012	10:10:43 AM	Main Vac valve closed
10/29/2012	10:11:08 AM	Main Vac valve opened
10/29/2012	10:12:33 AM	Recipe started at 10:12 AM
10/29/2012	10:12:33 AM	Helium valve closed
10/29/2012	10:12:33 AM	H2 valve closed
10/29/2012	10:12:33 AM	BCl3 valve closed
10/29/2012	10:12:33 AM	PH3 valve closed
10/29/2012	10:12:33 AM	SiCl4 pre valve closed
10/29/2012	10:12:33 AM	SiCl4 post valve closed
10/29/2012	10:12:33 AM	Main Vac valve closed
10/29/2012	10:12:33 AM	Bypass valve closed
10/29/2012	10:12:33 AM	Bubbler valve closed
10/29/2012	10:12:33 AM	Helium MFC set to  0.000000
10/29/2012	10:12:33 AM	H2 MFC set to  0.000000
10/29/2012	10:12:33 AM	BCl3 MFC set to  0.000000
10/29/2012	10:12:33 AM	PH3 MFC set to  0.000000
10/29/2012	10:12:33 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:12:33 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:12:34 AM	Tube furnace set to 0
10/29/2012	10:12:37 AM	Helium valve closed
10/29/2012	10:12:37 AM	BCl3 valve closed
10/29/2012	10:12:37 AM	PH3 valve closed
10/29/2012	10:12:37 AM	SiCl4 pre valve closed
10/29/2012	10:12:37 AM	SiCl4 post valve closed
10/29/2012	10:12:37 AM	Main Vac valve closed
10/29/2012	10:12:37 AM	Bypass valve closed
10/29/2012	10:12:37 AM	Bubbler valve closed
10/29/2012	10:12:37 AM	H2 valve opened
10/29/2012	10:12:37 AM	Helium MFC set to  0.000000
10/29/2012	10:12:37 AM	H2 MFC set to  500.000000
10/29/2012	10:12:37 AM	BCl3 MFC set to  0.000000
10/29/2012	10:12:37 AM	PH3 MFC set to  0.000000
10/29/2012	10:12:37 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:12:37 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:12:37 AM	Tube furnace set to 0
10/29/2012	10:13:49 AM	Helium valve closed
10/29/2012	10:13:49 AM	BCl3 valve closed
10/29/2012	10:13:49 AM	PH3 valve closed
10/29/2012	10:13:49 AM	SiCl4 pre valve closed
10/29/2012	10:13:49 AM	SiCl4 post valve closed
10/29/2012	10:13:49 AM	Main Vac valve closed
10/29/2012	10:13:49 AM	Bypass valve closed
10/29/2012	10:13:49 AM	H2 valve opened
10/29/2012	10:13:49 AM	Bubbler valve opened
10/29/2012	10:13:49 AM	Helium MFC set to  0.000000
10/29/2012	10:13:49 AM	H2 MFC set to  500.000000
10/29/2012	10:13:49 AM	BCl3 MFC set to  0.000000
10/29/2012	10:13:49 AM	PH3 MFC set to  0.000000
10/29/2012	10:13:49 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:13:49 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:13:49 AM	Tube furnace set to 0
10/29/2012	10:13:50 AM	Helium valve closed
10/29/2012	10:13:50 AM	BCl3 valve closed
10/29/2012	10:13:50 AM	PH3 valve closed
10/29/2012	10:13:50 AM	SiCl4 pre valve closed
10/29/2012	10:13:50 AM	SiCl4 post valve closed
10/29/2012	10:13:50 AM	Main Vac valve closed
10/29/2012	10:13:50 AM	Bypass valve closed
10/29/2012	10:13:50 AM	H2 valve opened
10/29/2012	10:13:50 AM	Bubbler valve opened
10/29/2012	10:13:50 AM	Helium MFC set to  0.000000
10/29/2012	10:13:50 AM	H2 MFC set to  500.000000
10/29/2012	10:13:50 AM	BCl3 MFC set to  0.000000
10/29/2012	10:13:50 AM	PH3 MFC set to  0.000000
10/29/2012	10:13:50 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:13:50 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:13:50 AM	Tube furnace set to 1000
10/29/2012	10:33:50 AM	Helium valve closed
10/29/2012	10:33:50 AM	PH3 valve closed
10/29/2012	10:33:50 AM	Main Vac valve closed
10/29/2012	10:33:50 AM	Bypass valve closed
10/29/2012	10:33:50 AM	H2 valve opened
10/29/2012	10:33:50 AM	BCl3 valve opened
10/29/2012	10:33:50 AM	SiCl4 pre valve opened
10/29/2012	10:33:50 AM	SiCl4 post valve opened
10/29/2012	10:33:50 AM	Bubbler valve opened
10/29/2012	10:33:50 AM	Helium MFC set to  0.000000
10/29/2012	10:33:50 AM	H2 MFC set to  450.000000
10/29/2012	10:33:50 AM	BCl3 MFC set to  1.500000
10/29/2012	10:33:50 AM	PH3 MFC set to  0.000000
10/29/2012	10:33:50 AM	SiCl4 MFC set to  50.000000
10/29/2012	10:33:50 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:33:50 AM	Tube furnace set to 1000
10/29/2012	10:45:50 AM	Helium valve closed
10/29/2012	10:45:50 AM	BCl3 valve closed
10/29/2012	10:45:50 AM	PH3 valve closed
10/29/2012	10:45:50 AM	SiCl4 pre valve closed
10/29/2012	10:45:50 AM	SiCl4 post valve closed
10/29/2012	10:45:50 AM	Main Vac valve closed
10/29/2012	10:45:50 AM	Bypass valve closed
10/29/2012	10:45:50 AM	H2 valve opened
10/29/2012	10:45:50 AM	Bubbler valve opened
10/29/2012	10:45:50 AM	Helium MFC set to  0.000000
10/29/2012	10:45:50 AM	H2 MFC set to  500.000000
10/29/2012	10:45:50 AM	BCl3 MFC set to  0.000000
10/29/2012	10:45:50 AM	PH3 MFC set to  0.000000
10/29/2012	10:45:50 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:45:50 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:45:51 AM	Tube furnace set to 950
10/29/2012	10:47:51 AM	Helium valve closed
10/29/2012	10:47:51 AM	BCl3 valve closed
10/29/2012	10:47:51 AM	PH3 valve closed
10/29/2012	10:47:51 AM	SiCl4 pre valve closed
10/29/2012	10:47:51 AM	SiCl4 post valve closed
10/29/2012	10:47:51 AM	Main Vac valve closed
10/29/2012	10:47:51 AM	Bypass valve closed
10/29/2012	10:47:51 AM	H2 valve opened
10/29/2012	10:47:51 AM	Bubbler valve opened
10/29/2012	10:47:51 AM	Helium MFC set to  0.000000
10/29/2012	10:47:51 AM	H2 MFC set to  500.000000
10/29/2012	10:47:51 AM	BCl3 MFC set to  0.000000
10/29/2012	10:47:51 AM	PH3 MFC set to  0.000000
10/29/2012	10:47:51 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:47:51 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:47:51 AM	Tube furnace set to 900
10/29/2012	10:49:51 AM	Helium valve closed
10/29/2012	10:49:51 AM	BCl3 valve closed
10/29/2012	10:49:51 AM	PH3 valve closed
10/29/2012	10:49:51 AM	SiCl4 pre valve closed
10/29/2012	10:49:51 AM	SiCl4 post valve closed
10/29/2012	10:49:51 AM	Main Vac valve closed
10/29/2012	10:49:51 AM	Bypass valve closed
10/29/2012	10:49:51 AM	H2 valve opened
10/29/2012	10:49:51 AM	Bubbler valve opened
10/29/2012	10:49:51 AM	Helium MFC set to  0.000000
10/29/2012	10:49:51 AM	H2 MFC set to  500.000000
10/29/2012	10:49:51 AM	BCl3 MFC set to  0.000000
10/29/2012	10:49:51 AM	PH3 MFC set to  0.000000
10/29/2012	10:49:51 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:49:51 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:49:51 AM	Tube furnace set to 850
10/29/2012	10:51:51 AM	H2 valve closed
10/29/2012	10:51:51 AM	BCl3 valve closed
10/29/2012	10:51:51 AM	PH3 valve closed
10/29/2012	10:51:51 AM	SiCl4 pre valve closed
10/29/2012	10:51:51 AM	SiCl4 post valve closed
10/29/2012	10:51:51 AM	Main Vac valve closed
10/29/2012	10:51:51 AM	Bypass valve closed
10/29/2012	10:51:51 AM	Helium valve opened
10/29/2012	10:51:51 AM	Bubbler valve opened
10/29/2012	10:51:51 AM	Helium MFC set to  500.000000
10/29/2012	10:51:51 AM	H2 MFC set to  0.000000
10/29/2012	10:51:51 AM	BCl3 MFC set to  0.000000
10/29/2012	10:51:51 AM	PH3 MFC set to  0.000000
10/29/2012	10:51:51 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:51:51 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:51:51 AM	Tube furnace set to 800
10/29/2012	10:53:51 AM	H2 valve closed
10/29/2012	10:53:51 AM	BCl3 valve closed
10/29/2012	10:53:51 AM	PH3 valve closed
10/29/2012	10:53:51 AM	SiCl4 pre valve closed
10/29/2012	10:53:51 AM	SiCl4 post valve closed
10/29/2012	10:53:51 AM	Main Vac valve closed
10/29/2012	10:53:51 AM	Bypass valve closed
10/29/2012	10:53:51 AM	Helium valve opened
10/29/2012	10:53:51 AM	Bubbler valve opened
10/29/2012	10:53:51 AM	Helium MFC set to  500.000000
10/29/2012	10:53:51 AM	H2 MFC set to  0.000000
10/29/2012	10:53:51 AM	BCl3 MFC set to  0.000000
10/29/2012	10:53:51 AM	PH3 MFC set to  0.000000
10/29/2012	10:53:51 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:53:51 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:53:52 AM	Tube furnace set to 750
10/29/2012	10:55:52 AM	H2 valve closed
10/29/2012	10:55:52 AM	BCl3 valve closed
10/29/2012	10:55:52 AM	PH3 valve closed
10/29/2012	10:55:52 AM	SiCl4 pre valve closed
10/29/2012	10:55:52 AM	SiCl4 post valve closed
10/29/2012	10:55:52 AM	Main Vac valve closed
10/29/2012	10:55:52 AM	Bypass valve closed
10/29/2012	10:55:52 AM	Helium valve opened
10/29/2012	10:55:52 AM	Bubbler valve opened
10/29/2012	10:55:52 AM	Helium MFC set to  500.000000
10/29/2012	10:55:52 AM	H2 MFC set to  0.000000
10/29/2012	10:55:52 AM	BCl3 MFC set to  0.000000
10/29/2012	10:55:52 AM	PH3 MFC set to  0.000000
10/29/2012	10:55:52 AM	SiCl4 MFC set to  0.000000
10/29/2012	10:55:52 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	10:55:52 AM	Tube furnace set to 0
10/29/2012	11:15:52 AM	Helium valve closed
10/29/2012	11:15:52 AM	H2 valve closed
10/29/2012	11:15:52 AM	BCl3 valve closed
10/29/2012	11:15:52 AM	PH3 valve closed
10/29/2012	11:15:52 AM	SiCl4 pre valve closed
10/29/2012	11:15:52 AM	SiCl4 post valve closed
10/29/2012	11:15:52 AM	Main Vac valve closed
10/29/2012	11:15:52 AM	Bypass valve closed
10/29/2012	11:15:52 AM	Bubbler valve closed
10/29/2012	11:15:52 AM	Helium MFC set to  0.000000
10/29/2012	11:15:52 AM	H2 MFC set to  0.000000
10/29/2012	11:15:52 AM	BCl3 MFC set to  0.000000
10/29/2012	11:15:52 AM	PH3 MFC set to  0.000000
10/29/2012	11:15:52 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:15:52 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:15:52 AM	Tube furnace set to 0
10/29/2012	11:15:53 AM	Helium valve closed
10/29/2012	11:15:53 AM	H2 valve closed
10/29/2012	11:15:53 AM	BCl3 valve closed
10/29/2012	11:15:53 AM	PH3 valve closed
10/29/2012	11:15:53 AM	SiCl4 pre valve closed
10/29/2012	11:15:53 AM	SiCl4 post valve closed
10/29/2012	11:15:53 AM	Main Vac valve closed
10/29/2012	11:15:53 AM	Bubbler valve closed
10/29/2012	11:15:53 AM	Bypass valve opened
10/29/2012	11:15:53 AM	Helium MFC set to  0.000000
10/29/2012	11:15:53 AM	H2 MFC set to  0.000000
10/29/2012	11:15:53 AM	BCl3 MFC set to  0.000000
10/29/2012	11:15:53 AM	PH3 MFC set to  0.000000
10/29/2012	11:15:53 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:15:53 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:15:53 AM	Tube furnace set to 0
10/29/2012	11:16:59 AM	Helium valve closed
10/29/2012	11:16:59 AM	H2 valve closed
10/29/2012	11:16:59 AM	BCl3 valve closed
10/29/2012	11:16:59 AM	PH3 valve closed
10/29/2012	11:16:59 AM	SiCl4 pre valve closed
10/29/2012	11:16:59 AM	SiCl4 post valve closed
10/29/2012	11:16:59 AM	Main Vac valve closed
10/29/2012	11:16:59 AM	Bubbler valve closed
10/29/2012	11:16:59 AM	Bypass valve opened
10/29/2012	11:16:59 AM	Helium MFC set to  0.000000
10/29/2012	11:16:59 AM	H2 MFC set to  0.000000
10/29/2012	11:16:59 AM	BCl3 MFC set to  0.000000
10/29/2012	11:16:59 AM	PH3 MFC set to  0.000000
10/29/2012	11:16:59 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:16:59 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:17:00 AM	Tube furnace set to 0
10/29/2012	11:18:00 AM	Helium valve closed
10/29/2012	11:18:00 AM	H2 valve closed
10/29/2012	11:18:00 AM	BCl3 valve closed
10/29/2012	11:18:00 AM	PH3 valve closed
10/29/2012	11:18:00 AM	SiCl4 pre valve closed
10/29/2012	11:18:00 AM	SiCl4 post valve closed
10/29/2012	11:18:00 AM	Bypass valve closed
10/29/2012	11:18:00 AM	Bubbler valve closed
10/29/2012	11:18:00 AM	Main Vac valve opened
10/29/2012	11:18:00 AM	Helium MFC set to  0.000000
10/29/2012	11:18:00 AM	H2 MFC set to  0.000000
10/29/2012	11:18:00 AM	BCl3 MFC set to  0.000000
10/29/2012	11:18:00 AM	PH3 MFC set to  0.000000
10/29/2012	11:18:00 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:18:00 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:18:00 AM	Tube furnace set to 0
10/29/2012	11:18:01 AM	Run finished at 11:18 AM
10/29/2012	11:42:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2012	11:42:18 AM	Recipe started at 11:42 AM
10/29/2012	11:42:18 AM	Helium valve closed
10/29/2012	11:42:18 AM	H2 valve closed
10/29/2012	11:42:18 AM	BCl3 valve closed
10/29/2012	11:42:18 AM	PH3 valve closed
10/29/2012	11:42:18 AM	SiCl4 pre valve closed
10/29/2012	11:42:18 AM	SiCl4 post valve closed
10/29/2012	11:42:18 AM	Main Vac valve closed
10/29/2012	11:42:18 AM	Bypass valve closed
10/29/2012	11:42:18 AM	Bubbler valve closed
10/29/2012	11:42:18 AM	Helium MFC set to  0.000000
10/29/2012	11:42:18 AM	H2 MFC set to  0.000000
10/29/2012	11:42:18 AM	BCl3 MFC set to  0.000000
10/29/2012	11:42:18 AM	PH3 MFC set to  0.000000
10/29/2012	11:42:18 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:42:18 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:42:18 AM	Tube furnace set to 0
10/29/2012	11:42:21 AM	H2 valve closed
10/29/2012	11:42:21 AM	BCl3 valve closed
10/29/2012	11:42:21 AM	PH3 valve closed
10/29/2012	11:42:21 AM	SiCl4 pre valve closed
10/29/2012	11:42:21 AM	SiCl4 post valve closed
10/29/2012	11:42:21 AM	Main Vac valve closed
10/29/2012	11:42:21 AM	Bypass valve closed
10/29/2012	11:42:21 AM	Bubbler valve closed
10/29/2012	11:42:21 AM	Helium valve opened
10/29/2012	11:42:21 AM	Helium MFC set to  500.000000
10/29/2012	11:42:22 AM	H2 MFC set to  0.000000
10/29/2012	11:42:22 AM	BCl3 MFC set to  0.000000
10/29/2012	11:42:22 AM	PH3 MFC set to  0.000000
10/29/2012	11:42:22 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:42:22 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:42:22 AM	Tube furnace set to 0
10/29/2012	11:43:34 AM	Helium valve closed
10/29/2012	11:43:34 AM	H2 valve closed
10/29/2012	11:43:34 AM	BCl3 valve closed
10/29/2012	11:43:34 AM	PH3 valve closed
10/29/2012	11:43:34 AM	SiCl4 pre valve closed
10/29/2012	11:43:34 AM	SiCl4 post valve closed
10/29/2012	11:43:34 AM	Main Vac valve closed
10/29/2012	11:43:34 AM	Bypass valve closed
10/29/2012	11:43:34 AM	Bubbler valve closed
10/29/2012	11:43:34 AM	Helium MFC set to  0.000000
10/29/2012	11:43:34 AM	H2 MFC set to  0.000000
10/29/2012	11:43:34 AM	BCl3 MFC set to  0.000000
10/29/2012	11:43:34 AM	PH3 MFC set to  0.000000
10/29/2012	11:43:34 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:43:34 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:43:34 AM	Tube furnace set to 0
10/29/2012	11:43:35 AM	Run finished at 11:43 AM
10/29/2012	11:43:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2012	11:47:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2012	11:47:23 AM	Recipe started at 11:47 AM
10/29/2012	11:47:23 AM	Helium valve closed
10/29/2012	11:47:23 AM	H2 valve closed
10/29/2012	11:47:23 AM	BCl3 valve closed
10/29/2012	11:47:23 AM	PH3 valve closed
10/29/2012	11:47:23 AM	SiCl4 pre valve closed
10/29/2012	11:47:23 AM	SiCl4 post valve closed
10/29/2012	11:47:23 AM	Main Vac valve closed
10/29/2012	11:47:23 AM	Bubbler valve closed
10/29/2012	11:47:23 AM	Bypass valve opened
10/29/2012	11:47:23 AM	Helium MFC set to  0.000000
10/29/2012	11:47:23 AM	H2 MFC set to  0.000000
10/29/2012	11:47:23 AM	BCl3 MFC set to  0.000000
10/29/2012	11:47:23 AM	PH3 MFC set to  0.000000
10/29/2012	11:47:23 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:47:23 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:47:23 AM	Tube furnace set to 0
10/29/2012	11:48:42 AM	Helium valve closed
10/29/2012	11:48:42 AM	H2 valve closed
10/29/2012	11:48:42 AM	BCl3 valve closed
10/29/2012	11:48:42 AM	PH3 valve closed
10/29/2012	11:48:42 AM	SiCl4 pre valve closed
10/29/2012	11:48:42 AM	SiCl4 post valve closed
10/29/2012	11:48:42 AM	Main Vac valve closed
10/29/2012	11:48:42 AM	Bubbler valve closed
10/29/2012	11:48:42 AM	Bypass valve opened
10/29/2012	11:48:42 AM	Helium MFC set to  0.000000
10/29/2012	11:48:42 AM	H2 MFC set to  0.000000
10/29/2012	11:48:42 AM	BCl3 MFC set to  0.000000
10/29/2012	11:48:42 AM	PH3 MFC set to  0.000000
10/29/2012	11:48:42 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:48:43 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:48:43 AM	Tube furnace set to 0
10/29/2012	11:49:43 AM	Helium valve closed
10/29/2012	11:49:43 AM	H2 valve closed
10/29/2012	11:49:43 AM	BCl3 valve closed
10/29/2012	11:49:43 AM	PH3 valve closed
10/29/2012	11:49:43 AM	SiCl4 pre valve closed
10/29/2012	11:49:43 AM	SiCl4 post valve closed
10/29/2012	11:49:43 AM	Bypass valve closed
10/29/2012	11:49:43 AM	Bubbler valve closed
10/29/2012	11:49:43 AM	Main Vac valve opened
10/29/2012	11:49:43 AM	Helium MFC set to  0.000000
10/29/2012	11:49:43 AM	H2 MFC set to  0.000000
10/29/2012	11:49:43 AM	BCl3 MFC set to  0.000000
10/29/2012	11:49:43 AM	PH3 MFC set to  0.000000
10/29/2012	11:49:43 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:49:43 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:49:43 AM	Tube furnace set to 0
10/29/2012	11:49:44 AM	Run finished at 11:49 AM
10/29/2012	11:49:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2012	11:58:59 AM	Recipe started at 11:58 AM
10/29/2012	11:58:59 AM	Helium valve closed
10/29/2012	11:58:59 AM	H2 valve closed
10/29/2012	11:58:59 AM	BCl3 valve closed
10/29/2012	11:58:59 AM	PH3 valve closed
10/29/2012	11:58:59 AM	SiCl4 pre valve closed
10/29/2012	11:58:59 AM	SiCl4 post valve closed
10/29/2012	11:58:59 AM	Bypass valve closed
10/29/2012	11:58:59 AM	Bubbler valve closed
10/29/2012	11:58:59 AM	Main Vac valve opened
10/29/2012	11:58:59 AM	Helium MFC set to  0.000000
10/29/2012	11:58:59 AM	H2 MFC set to  0.000000
10/29/2012	11:58:59 AM	BCl3 MFC set to  0.000000
10/29/2012	11:58:59 AM	PH3 MFC set to  0.000000
10/29/2012	11:58:59 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:58:59 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:58:59 AM	Tube furnace set to 0
10/29/2012	11:59:29 AM	H2 valve closed
10/29/2012	11:59:29 AM	BCl3 valve closed
10/29/2012	11:59:29 AM	PH3 valve closed
10/29/2012	11:59:29 AM	SiCl4 pre valve closed
10/29/2012	11:59:29 AM	SiCl4 post valve closed
10/29/2012	11:59:29 AM	Bypass valve closed
10/29/2012	11:59:29 AM	Bubbler valve closed
10/29/2012	11:59:29 AM	Helium valve opened
10/29/2012	11:59:29 AM	Main Vac valve opened
10/29/2012	11:59:29 AM	Helium MFC set to  20.000000
10/29/2012	11:59:29 AM	H2 MFC set to  0.000000
10/29/2012	11:59:29 AM	BCl3 MFC set to  0.000000
10/29/2012	11:59:29 AM	PH3 MFC set to  0.000000
10/29/2012	11:59:29 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:59:29 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:59:29 AM	Tube furnace set to 0
10/29/2012	11:59:59 AM	Helium valve closed
10/29/2012	11:59:59 AM	H2 valve closed
10/29/2012	11:59:59 AM	BCl3 valve closed
10/29/2012	11:59:59 AM	PH3 valve closed
10/29/2012	11:59:59 AM	SiCl4 pre valve closed
10/29/2012	11:59:59 AM	SiCl4 post valve closed
10/29/2012	11:59:59 AM	Bypass valve closed
10/29/2012	11:59:59 AM	Bubbler valve closed
10/29/2012	11:59:59 AM	Main Vac valve opened
10/29/2012	11:59:59 AM	Helium MFC set to  0.000000
10/29/2012	11:59:59 AM	H2 MFC set to  0.000000
10/29/2012	11:59:59 AM	BCl3 MFC set to  0.000000
10/29/2012	11:59:59 AM	PH3 MFC set to  0.000000
10/29/2012	11:59:59 AM	SiCl4 MFC set to  0.000000
10/29/2012	11:59:59 AM	Bypass solenoid MFC set to  0.000000
10/29/2012	11:59:59 AM	Tube furnace set to 0
10/29/2012	12:00:29 PM	H2 valve closed
10/29/2012	12:00:29 PM	BCl3 valve closed
10/29/2012	12:00:29 PM	PH3 valve closed
10/29/2012	12:00:29 PM	SiCl4 pre valve closed
10/29/2012	12:00:29 PM	SiCl4 post valve closed
10/29/2012	12:00:29 PM	Bypass valve closed
10/29/2012	12:00:29 PM	Bubbler valve closed
10/29/2012	12:00:29 PM	Helium valve opened
10/29/2012	12:00:29 PM	Main Vac valve opened
10/29/2012	12:00:29 PM	Helium MFC set to  20.000000
10/29/2012	12:00:29 PM	H2 MFC set to  0.000000
10/29/2012	12:00:29 PM	BCl3 MFC set to  0.000000
10/29/2012	12:00:29 PM	PH3 MFC set to  0.000000
10/29/2012	12:00:29 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:00:29 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:00:30 PM	Tube furnace set to 0
10/29/2012	12:01:00 PM	Helium valve closed
10/29/2012	12:01:00 PM	H2 valve closed
10/29/2012	12:01:00 PM	BCl3 valve closed
10/29/2012	12:01:00 PM	PH3 valve closed
10/29/2012	12:01:00 PM	SiCl4 pre valve closed
10/29/2012	12:01:00 PM	SiCl4 post valve closed
10/29/2012	12:01:00 PM	Bypass valve closed
10/29/2012	12:01:00 PM	Bubbler valve closed
10/29/2012	12:01:00 PM	Main Vac valve opened
10/29/2012	12:01:00 PM	Helium MFC set to  0.000000
10/29/2012	12:01:00 PM	H2 MFC set to  0.000000
10/29/2012	12:01:00 PM	BCl3 MFC set to  0.000000
10/29/2012	12:01:00 PM	PH3 MFC set to  0.000000
10/29/2012	12:01:00 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:01:00 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:01:00 PM	Tube furnace set to 0
10/29/2012	12:01:30 PM	H2 valve closed
10/29/2012	12:01:30 PM	BCl3 valve closed
10/29/2012	12:01:30 PM	PH3 valve closed
10/29/2012	12:01:30 PM	SiCl4 pre valve closed
10/29/2012	12:01:30 PM	SiCl4 post valve closed
10/29/2012	12:01:30 PM	Bypass valve closed
10/29/2012	12:01:30 PM	Bubbler valve closed
10/29/2012	12:01:30 PM	Helium valve opened
10/29/2012	12:01:30 PM	Main Vac valve opened
10/29/2012	12:01:30 PM	Helium MFC set to  20.000000
10/29/2012	12:01:30 PM	H2 MFC set to  0.000000
10/29/2012	12:01:30 PM	BCl3 MFC set to  0.000000
10/29/2012	12:01:30 PM	PH3 MFC set to  0.000000
10/29/2012	12:01:30 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:01:30 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:01:30 PM	Tube furnace set to 0
10/29/2012	12:02:00 PM	Helium valve closed
10/29/2012	12:02:00 PM	H2 valve closed
10/29/2012	12:02:00 PM	BCl3 valve closed
10/29/2012	12:02:00 PM	PH3 valve closed
10/29/2012	12:02:00 PM	SiCl4 pre valve closed
10/29/2012	12:02:00 PM	SiCl4 post valve closed
10/29/2012	12:02:00 PM	Bypass valve closed
10/29/2012	12:02:00 PM	Bubbler valve closed
10/29/2012	12:02:00 PM	Main Vac valve opened
10/29/2012	12:02:00 PM	Helium MFC set to  0.000000
10/29/2012	12:02:00 PM	H2 MFC set to  0.000000
10/29/2012	12:02:00 PM	BCl3 MFC set to  0.000000
10/29/2012	12:02:00 PM	PH3 MFC set to  0.000000
10/29/2012	12:02:00 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:02:00 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:02:00 PM	Tube furnace set to 0
10/29/2012	12:02:30 PM	H2 valve closed
10/29/2012	12:02:30 PM	BCl3 valve closed
10/29/2012	12:02:30 PM	PH3 valve closed
10/29/2012	12:02:30 PM	SiCl4 pre valve closed
10/29/2012	12:02:30 PM	SiCl4 post valve closed
10/29/2012	12:02:30 PM	Bypass valve closed
10/29/2012	12:02:30 PM	Bubbler valve closed
10/29/2012	12:02:30 PM	Helium valve opened
10/29/2012	12:02:30 PM	Main Vac valve opened
10/29/2012	12:02:30 PM	Helium MFC set to  20.000000
10/29/2012	12:02:30 PM	H2 MFC set to  0.000000
10/29/2012	12:02:30 PM	BCl3 MFC set to  0.000000
10/29/2012	12:02:30 PM	PH3 MFC set to  0.000000
10/29/2012	12:02:30 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:02:30 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:02:31 PM	Tube furnace set to 0
10/29/2012	12:03:01 PM	Helium valve closed
10/29/2012	12:03:01 PM	H2 valve closed
10/29/2012	12:03:01 PM	BCl3 valve closed
10/29/2012	12:03:01 PM	PH3 valve closed
10/29/2012	12:03:01 PM	SiCl4 pre valve closed
10/29/2012	12:03:01 PM	SiCl4 post valve closed
10/29/2012	12:03:01 PM	Bypass valve closed
10/29/2012	12:03:01 PM	Bubbler valve closed
10/29/2012	12:03:01 PM	Main Vac valve opened
10/29/2012	12:03:01 PM	Helium MFC set to  0.000000
10/29/2012	12:03:01 PM	H2 MFC set to  0.000000
10/29/2012	12:03:01 PM	BCl3 MFC set to  0.000000
10/29/2012	12:03:01 PM	PH3 MFC set to  0.000000
10/29/2012	12:03:01 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:03:01 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:03:01 PM	Tube furnace set to 0
10/29/2012	12:03:31 PM	H2 valve closed
10/29/2012	12:03:31 PM	BCl3 valve closed
10/29/2012	12:03:31 PM	PH3 valve closed
10/29/2012	12:03:31 PM	SiCl4 pre valve closed
10/29/2012	12:03:31 PM	SiCl4 post valve closed
10/29/2012	12:03:31 PM	Bypass valve closed
10/29/2012	12:03:31 PM	Bubbler valve closed
10/29/2012	12:03:31 PM	Helium valve opened
10/29/2012	12:03:31 PM	Main Vac valve opened
10/29/2012	12:03:31 PM	Helium MFC set to  20.000000
10/29/2012	12:03:31 PM	H2 MFC set to  0.000000
10/29/2012	12:03:31 PM	BCl3 MFC set to  0.000000
10/29/2012	12:03:31 PM	PH3 MFC set to  0.000000
10/29/2012	12:03:31 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:03:31 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:03:31 PM	Tube furnace set to 0
10/29/2012	12:04:01 PM	Helium valve closed
10/29/2012	12:04:01 PM	H2 valve closed
10/29/2012	12:04:01 PM	BCl3 valve closed
10/29/2012	12:04:01 PM	PH3 valve closed
10/29/2012	12:04:01 PM	SiCl4 pre valve closed
10/29/2012	12:04:01 PM	SiCl4 post valve closed
10/29/2012	12:04:01 PM	Bypass valve closed
10/29/2012	12:04:01 PM	Bubbler valve closed
10/29/2012	12:04:01 PM	Main Vac valve opened
10/29/2012	12:04:01 PM	Helium MFC set to  0.000000
10/29/2012	12:04:01 PM	H2 MFC set to  0.000000
10/29/2012	12:04:01 PM	BCl3 MFC set to  0.000000
10/29/2012	12:04:01 PM	PH3 MFC set to  0.000000
10/29/2012	12:04:01 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:04:01 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:04:01 PM	Tube furnace set to 0
10/29/2012	12:04:31 PM	H2 valve closed
10/29/2012	12:04:31 PM	BCl3 valve closed
10/29/2012	12:04:31 PM	PH3 valve closed
10/29/2012	12:04:31 PM	SiCl4 pre valve closed
10/29/2012	12:04:31 PM	SiCl4 post valve closed
10/29/2012	12:04:31 PM	Bypass valve closed
10/29/2012	12:04:31 PM	Bubbler valve closed
10/29/2012	12:04:31 PM	Helium valve opened
10/29/2012	12:04:31 PM	Main Vac valve opened
10/29/2012	12:04:31 PM	Helium MFC set to  20.000000
10/29/2012	12:04:31 PM	H2 MFC set to  0.000000
10/29/2012	12:04:31 PM	BCl3 MFC set to  0.000000
10/29/2012	12:04:31 PM	PH3 MFC set to  0.000000
10/29/2012	12:04:31 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:04:31 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:04:32 PM	Tube furnace set to 0
10/29/2012	12:05:02 PM	Helium valve closed
10/29/2012	12:05:02 PM	H2 valve closed
10/29/2012	12:05:02 PM	BCl3 valve closed
10/29/2012	12:05:02 PM	PH3 valve closed
10/29/2012	12:05:02 PM	SiCl4 pre valve closed
10/29/2012	12:05:02 PM	SiCl4 post valve closed
10/29/2012	12:05:02 PM	Bypass valve closed
10/29/2012	12:05:02 PM	Bubbler valve closed
10/29/2012	12:05:02 PM	Main Vac valve opened
10/29/2012	12:05:02 PM	Helium MFC set to  0.000000
10/29/2012	12:05:02 PM	H2 MFC set to  0.000000
10/29/2012	12:05:02 PM	BCl3 MFC set to  0.000000
10/29/2012	12:05:02 PM	PH3 MFC set to  0.000000
10/29/2012	12:05:02 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:05:02 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:05:02 PM	Tube furnace set to 0
10/29/2012	12:05:32 PM	H2 valve closed
10/29/2012	12:05:32 PM	BCl3 valve closed
10/29/2012	12:05:32 PM	PH3 valve closed
10/29/2012	12:05:32 PM	SiCl4 pre valve closed
10/29/2012	12:05:32 PM	SiCl4 post valve closed
10/29/2012	12:05:32 PM	Bypass valve closed
10/29/2012	12:05:32 PM	Bubbler valve closed
10/29/2012	12:05:32 PM	Helium valve opened
10/29/2012	12:05:32 PM	Main Vac valve opened
10/29/2012	12:05:32 PM	Helium MFC set to  20.000000
10/29/2012	12:05:32 PM	H2 MFC set to  0.000000
10/29/2012	12:05:32 PM	BCl3 MFC set to  0.000000
10/29/2012	12:05:32 PM	PH3 MFC set to  0.000000
10/29/2012	12:05:32 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:05:32 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:05:32 PM	Tube furnace set to 0
10/29/2012	12:06:02 PM	Helium valve closed
10/29/2012	12:06:02 PM	H2 valve closed
10/29/2012	12:06:02 PM	BCl3 valve closed
10/29/2012	12:06:02 PM	PH3 valve closed
10/29/2012	12:06:02 PM	SiCl4 pre valve closed
10/29/2012	12:06:02 PM	SiCl4 post valve closed
10/29/2012	12:06:02 PM	Bypass valve closed
10/29/2012	12:06:02 PM	Bubbler valve closed
10/29/2012	12:06:02 PM	Main Vac valve opened
10/29/2012	12:06:02 PM	Helium MFC set to  0.000000
10/29/2012	12:06:02 PM	H2 MFC set to  0.000000
10/29/2012	12:06:02 PM	BCl3 MFC set to  0.000000
10/29/2012	12:06:02 PM	PH3 MFC set to  0.000000
10/29/2012	12:06:02 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:06:02 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:06:02 PM	Tube furnace set to 0
10/29/2012	12:06:32 PM	H2 valve closed
10/29/2012	12:06:32 PM	BCl3 valve closed
10/29/2012	12:06:32 PM	PH3 valve closed
10/29/2012	12:06:32 PM	SiCl4 pre valve closed
10/29/2012	12:06:32 PM	SiCl4 post valve closed
10/29/2012	12:06:32 PM	Bypass valve closed
10/29/2012	12:06:32 PM	Bubbler valve closed
10/29/2012	12:06:32 PM	Helium valve opened
10/29/2012	12:06:32 PM	Main Vac valve opened
10/29/2012	12:06:32 PM	Helium MFC set to  20.000000
10/29/2012	12:06:32 PM	H2 MFC set to  0.000000
10/29/2012	12:06:32 PM	BCl3 MFC set to  0.000000
10/29/2012	12:06:32 PM	PH3 MFC set to  0.000000
10/29/2012	12:06:32 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:06:32 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:06:33 PM	Tube furnace set to 0
10/29/2012	12:07:03 PM	Helium valve closed
10/29/2012	12:07:03 PM	H2 valve closed
10/29/2012	12:07:03 PM	BCl3 valve closed
10/29/2012	12:07:03 PM	PH3 valve closed
10/29/2012	12:07:03 PM	SiCl4 pre valve closed
10/29/2012	12:07:03 PM	SiCl4 post valve closed
10/29/2012	12:07:03 PM	Bypass valve closed
10/29/2012	12:07:03 PM	Bubbler valve closed
10/29/2012	12:07:03 PM	Main Vac valve opened
10/29/2012	12:07:03 PM	Helium MFC set to  0.000000
10/29/2012	12:07:03 PM	H2 MFC set to  0.000000
10/29/2012	12:07:03 PM	BCl3 MFC set to  0.000000
10/29/2012	12:07:03 PM	PH3 MFC set to  0.000000
10/29/2012	12:07:03 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:07:03 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:07:03 PM	Tube furnace set to 0
10/29/2012	12:07:33 PM	H2 valve closed
10/29/2012	12:07:33 PM	BCl3 valve closed
10/29/2012	12:07:33 PM	PH3 valve closed
10/29/2012	12:07:33 PM	SiCl4 pre valve closed
10/29/2012	12:07:33 PM	SiCl4 post valve closed
10/29/2012	12:07:33 PM	Bypass valve closed
10/29/2012	12:07:33 PM	Bubbler valve closed
10/29/2012	12:07:33 PM	Helium valve opened
10/29/2012	12:07:33 PM	Main Vac valve opened
10/29/2012	12:07:33 PM	Helium MFC set to  20.000000
10/29/2012	12:07:33 PM	H2 MFC set to  0.000000
10/29/2012	12:07:33 PM	BCl3 MFC set to  0.000000
10/29/2012	12:07:33 PM	PH3 MFC set to  0.000000
10/29/2012	12:07:33 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:07:33 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:07:33 PM	Tube furnace set to 0
10/29/2012	12:08:03 PM	Helium valve closed
10/29/2012	12:08:03 PM	H2 valve closed
10/29/2012	12:08:03 PM	BCl3 valve closed
10/29/2012	12:08:03 PM	PH3 valve closed
10/29/2012	12:08:03 PM	SiCl4 pre valve closed
10/29/2012	12:08:03 PM	SiCl4 post valve closed
10/29/2012	12:08:03 PM	Bypass valve closed
10/29/2012	12:08:03 PM	Bubbler valve closed
10/29/2012	12:08:03 PM	Main Vac valve opened
10/29/2012	12:08:03 PM	Helium MFC set to  0.000000
10/29/2012	12:08:03 PM	H2 MFC set to  0.000000
10/29/2012	12:08:03 PM	BCl3 MFC set to  0.000000
10/29/2012	12:08:03 PM	PH3 MFC set to  0.000000
10/29/2012	12:08:03 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:08:03 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:08:03 PM	Tube furnace set to 200
10/29/2012	12:08:33 PM	H2 valve closed
10/29/2012	12:08:33 PM	BCl3 valve closed
10/29/2012	12:08:33 PM	PH3 valve closed
10/29/2012	12:08:33 PM	SiCl4 pre valve closed
10/29/2012	12:08:33 PM	SiCl4 post valve closed
10/29/2012	12:08:33 PM	Bypass valve closed
10/29/2012	12:08:33 PM	Bubbler valve closed
10/29/2012	12:08:33 PM	Helium valve opened
10/29/2012	12:08:33 PM	Main Vac valve opened
10/29/2012	12:08:33 PM	Helium MFC set to  20.000000
10/29/2012	12:08:33 PM	H2 MFC set to  0.000000
10/29/2012	12:08:33 PM	BCl3 MFC set to  0.000000
10/29/2012	12:08:33 PM	PH3 MFC set to  0.000000
10/29/2012	12:08:33 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:08:33 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:08:34 PM	Tube furnace set to 200
10/29/2012	12:09:04 PM	Helium valve closed
10/29/2012	12:09:04 PM	H2 valve closed
10/29/2012	12:09:04 PM	BCl3 valve closed
10/29/2012	12:09:04 PM	PH3 valve closed
10/29/2012	12:09:04 PM	SiCl4 pre valve closed
10/29/2012	12:09:04 PM	SiCl4 post valve closed
10/29/2012	12:09:04 PM	Bypass valve closed
10/29/2012	12:09:04 PM	Bubbler valve closed
10/29/2012	12:09:04 PM	Main Vac valve opened
10/29/2012	12:09:04 PM	Helium MFC set to  0.000000
10/29/2012	12:09:04 PM	H2 MFC set to  0.000000
10/29/2012	12:09:04 PM	BCl3 MFC set to  0.000000
10/29/2012	12:09:04 PM	PH3 MFC set to  0.000000
10/29/2012	12:09:04 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:09:04 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:09:04 PM	Tube furnace set to 200
10/29/2012	12:09:34 PM	H2 valve closed
10/29/2012	12:09:34 PM	BCl3 valve closed
10/29/2012	12:09:34 PM	PH3 valve closed
10/29/2012	12:09:34 PM	SiCl4 pre valve closed
10/29/2012	12:09:34 PM	SiCl4 post valve closed
10/29/2012	12:09:34 PM	Bypass valve closed
10/29/2012	12:09:34 PM	Bubbler valve closed
10/29/2012	12:09:34 PM	Helium valve opened
10/29/2012	12:09:34 PM	Main Vac valve opened
10/29/2012	12:09:34 PM	Helium MFC set to  20.000000
10/29/2012	12:09:34 PM	H2 MFC set to  0.000000
10/29/2012	12:09:34 PM	BCl3 MFC set to  0.000000
10/29/2012	12:09:34 PM	PH3 MFC set to  0.000000
10/29/2012	12:09:34 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:09:34 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:09:34 PM	Tube furnace set to 200
10/29/2012	12:10:04 PM	Helium valve closed
10/29/2012	12:10:04 PM	H2 valve closed
10/29/2012	12:10:04 PM	BCl3 valve closed
10/29/2012	12:10:04 PM	PH3 valve closed
10/29/2012	12:10:04 PM	SiCl4 pre valve closed
10/29/2012	12:10:04 PM	SiCl4 post valve closed
10/29/2012	12:10:04 PM	Bypass valve closed
10/29/2012	12:10:04 PM	Bubbler valve closed
10/29/2012	12:10:04 PM	Main Vac valve opened
10/29/2012	12:10:04 PM	Helium MFC set to  0.000000
10/29/2012	12:10:04 PM	H2 MFC set to  0.000000
10/29/2012	12:10:04 PM	BCl3 MFC set to  0.000000
10/29/2012	12:10:04 PM	PH3 MFC set to  0.000000
10/29/2012	12:10:04 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:10:04 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:10:04 PM	Tube furnace set to 200
10/29/2012	12:10:34 PM	H2 valve closed
10/29/2012	12:10:34 PM	BCl3 valve closed
10/29/2012	12:10:34 PM	PH3 valve closed
10/29/2012	12:10:34 PM	SiCl4 pre valve closed
10/29/2012	12:10:34 PM	SiCl4 post valve closed
10/29/2012	12:10:34 PM	Bypass valve closed
10/29/2012	12:10:34 PM	Bubbler valve closed
10/29/2012	12:10:34 PM	Helium valve opened
10/29/2012	12:10:34 PM	Main Vac valve opened
10/29/2012	12:10:34 PM	Helium MFC set to  20.000000
10/29/2012	12:10:34 PM	H2 MFC set to  0.000000
10/29/2012	12:10:34 PM	BCl3 MFC set to  0.000000
10/29/2012	12:10:34 PM	PH3 MFC set to  0.000000
10/29/2012	12:10:34 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:10:34 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:10:35 PM	Tube furnace set to 200
10/29/2012	12:11:05 PM	Helium valve closed
10/29/2012	12:11:05 PM	H2 valve closed
10/29/2012	12:11:05 PM	BCl3 valve closed
10/29/2012	12:11:05 PM	PH3 valve closed
10/29/2012	12:11:05 PM	SiCl4 pre valve closed
10/29/2012	12:11:05 PM	SiCl4 post valve closed
10/29/2012	12:11:05 PM	Bypass valve closed
10/29/2012	12:11:05 PM	Bubbler valve closed
10/29/2012	12:11:05 PM	Main Vac valve opened
10/29/2012	12:11:05 PM	Helium MFC set to  0.000000
10/29/2012	12:11:05 PM	H2 MFC set to  0.000000
10/29/2012	12:11:05 PM	BCl3 MFC set to  0.000000
10/29/2012	12:11:05 PM	PH3 MFC set to  0.000000
10/29/2012	12:11:05 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:11:05 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:11:05 PM	Tube furnace set to 200
10/29/2012	12:11:35 PM	H2 valve closed
10/29/2012	12:11:35 PM	BCl3 valve closed
10/29/2012	12:11:35 PM	PH3 valve closed
10/29/2012	12:11:35 PM	SiCl4 pre valve closed
10/29/2012	12:11:35 PM	SiCl4 post valve closed
10/29/2012	12:11:35 PM	Bypass valve closed
10/29/2012	12:11:35 PM	Bubbler valve closed
10/29/2012	12:11:35 PM	Helium valve opened
10/29/2012	12:11:35 PM	Main Vac valve opened
10/29/2012	12:11:35 PM	Helium MFC set to  20.000000
10/29/2012	12:11:35 PM	H2 MFC set to  0.000000
10/29/2012	12:11:35 PM	BCl3 MFC set to  0.000000
10/29/2012	12:11:35 PM	PH3 MFC set to  0.000000
10/29/2012	12:11:35 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:11:35 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:11:35 PM	Tube furnace set to 200
10/29/2012	12:12:05 PM	Helium valve closed
10/29/2012	12:12:05 PM	H2 valve closed
10/29/2012	12:12:05 PM	BCl3 valve closed
10/29/2012	12:12:05 PM	PH3 valve closed
10/29/2012	12:12:05 PM	SiCl4 pre valve closed
10/29/2012	12:12:05 PM	SiCl4 post valve closed
10/29/2012	12:12:05 PM	Bypass valve closed
10/29/2012	12:12:05 PM	Bubbler valve closed
10/29/2012	12:12:05 PM	Main Vac valve opened
10/29/2012	12:12:05 PM	Helium MFC set to  0.000000
10/29/2012	12:12:05 PM	H2 MFC set to  0.000000
10/29/2012	12:12:05 PM	BCl3 MFC set to  0.000000
10/29/2012	12:12:05 PM	PH3 MFC set to  0.000000
10/29/2012	12:12:05 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:12:05 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:12:05 PM	Tube furnace set to 200
10/29/2012	12:12:35 PM	H2 valve closed
10/29/2012	12:12:35 PM	BCl3 valve closed
10/29/2012	12:12:35 PM	PH3 valve closed
10/29/2012	12:12:35 PM	SiCl4 pre valve closed
10/29/2012	12:12:35 PM	SiCl4 post valve closed
10/29/2012	12:12:35 PM	Bypass valve closed
10/29/2012	12:12:35 PM	Bubbler valve closed
10/29/2012	12:12:35 PM	Helium valve opened
10/29/2012	12:12:35 PM	Main Vac valve opened
10/29/2012	12:12:35 PM	Helium MFC set to  20.000000
10/29/2012	12:12:35 PM	H2 MFC set to  0.000000
10/29/2012	12:12:35 PM	BCl3 MFC set to  0.000000
10/29/2012	12:12:35 PM	PH3 MFC set to  0.000000
10/29/2012	12:12:35 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:12:35 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:12:36 PM	Tube furnace set to 200
10/29/2012	12:13:06 PM	Helium valve closed
10/29/2012	12:13:06 PM	H2 valve closed
10/29/2012	12:13:06 PM	BCl3 valve closed
10/29/2012	12:13:06 PM	PH3 valve closed
10/29/2012	12:13:06 PM	SiCl4 pre valve closed
10/29/2012	12:13:06 PM	SiCl4 post valve closed
10/29/2012	12:13:06 PM	Bypass valve closed
10/29/2012	12:13:06 PM	Bubbler valve closed
10/29/2012	12:13:06 PM	Main Vac valve opened
10/29/2012	12:13:06 PM	Helium MFC set to  0.000000
10/29/2012	12:13:06 PM	H2 MFC set to  0.000000
10/29/2012	12:13:06 PM	BCl3 MFC set to  0.000000
10/29/2012	12:13:06 PM	PH3 MFC set to  0.000000
10/29/2012	12:13:06 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:13:06 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:13:06 PM	Tube furnace set to 200
10/29/2012	12:13:36 PM	H2 valve closed
10/29/2012	12:13:36 PM	BCl3 valve closed
10/29/2012	12:13:36 PM	PH3 valve closed
10/29/2012	12:13:36 PM	SiCl4 pre valve closed
10/29/2012	12:13:36 PM	SiCl4 post valve closed
10/29/2012	12:13:36 PM	Bypass valve closed
10/29/2012	12:13:36 PM	Bubbler valve closed
10/29/2012	12:13:36 PM	Helium valve opened
10/29/2012	12:13:36 PM	Main Vac valve opened
10/29/2012	12:13:36 PM	Helium MFC set to  20.000000
10/29/2012	12:13:36 PM	H2 MFC set to  0.000000
10/29/2012	12:13:36 PM	BCl3 MFC set to  0.000000
10/29/2012	12:13:36 PM	PH3 MFC set to  0.000000
10/29/2012	12:13:36 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:13:36 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:13:36 PM	Tube furnace set to 200
10/29/2012	12:14:06 PM	Helium valve closed
10/29/2012	12:14:06 PM	H2 valve closed
10/29/2012	12:14:06 PM	BCl3 valve closed
10/29/2012	12:14:06 PM	PH3 valve closed
10/29/2012	12:14:06 PM	SiCl4 pre valve closed
10/29/2012	12:14:06 PM	SiCl4 post valve closed
10/29/2012	12:14:06 PM	Bypass valve closed
10/29/2012	12:14:06 PM	Bubbler valve closed
10/29/2012	12:14:06 PM	Main Vac valve opened
10/29/2012	12:14:06 PM	Helium MFC set to  0.000000
10/29/2012	12:14:06 PM	H2 MFC set to  0.000000
10/29/2012	12:14:06 PM	BCl3 MFC set to  0.000000
10/29/2012	12:14:06 PM	PH3 MFC set to  0.000000
10/29/2012	12:14:06 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:14:06 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:14:06 PM	Tube furnace set to 0
10/29/2012	12:14:07 PM	Run finished at 12:14 PM
10/29/2012	12:29:29 PM	Recipe started at 12:29 PM
10/29/2012	12:29:29 PM	Helium valve closed
10/29/2012	12:29:29 PM	H2 valve closed
10/29/2012	12:29:29 PM	BCl3 valve closed
10/29/2012	12:29:29 PM	PH3 valve closed
10/29/2012	12:29:29 PM	SiCl4 pre valve closed
10/29/2012	12:29:29 PM	SiCl4 post valve closed
10/29/2012	12:29:29 PM	Main Vac valve closed
10/29/2012	12:29:29 PM	Bypass valve closed
10/29/2012	12:29:29 PM	Bubbler valve closed
10/29/2012	12:29:29 PM	Helium MFC set to  0.000000
10/29/2012	12:29:29 PM	H2 MFC set to  0.000000
10/29/2012	12:29:29 PM	BCl3 MFC set to  0.000000
10/29/2012	12:29:29 PM	PH3 MFC set to  0.000000
10/29/2012	12:29:29 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:29:29 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:29:30 PM	Tube furnace set to 0
10/29/2012	12:29:33 PM	Helium valve closed
10/29/2012	12:29:33 PM	BCl3 valve closed
10/29/2012	12:29:33 PM	PH3 valve closed
10/29/2012	12:29:33 PM	SiCl4 pre valve closed
10/29/2012	12:29:33 PM	SiCl4 post valve closed
10/29/2012	12:29:33 PM	Main Vac valve closed
10/29/2012	12:29:33 PM	Bypass valve closed
10/29/2012	12:29:33 PM	Bubbler valve closed
10/29/2012	12:29:33 PM	H2 valve opened
10/29/2012	12:29:33 PM	Helium MFC set to  0.000000
10/29/2012	12:29:33 PM	H2 MFC set to  500.000000
10/29/2012	12:29:33 PM	BCl3 MFC set to  0.000000
10/29/2012	12:29:33 PM	PH3 MFC set to  0.000000
10/29/2012	12:29:33 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:29:33 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:29:33 PM	Tube furnace set to 0
10/29/2012	12:30:46 PM	Helium valve closed
10/29/2012	12:30:46 PM	BCl3 valve closed
10/29/2012	12:30:46 PM	PH3 valve closed
10/29/2012	12:30:46 PM	SiCl4 pre valve closed
10/29/2012	12:30:46 PM	SiCl4 post valve closed
10/29/2012	12:30:46 PM	Main Vac valve closed
10/29/2012	12:30:46 PM	Bypass valve closed
10/29/2012	12:30:46 PM	H2 valve opened
10/29/2012	12:30:46 PM	Bubbler valve opened
10/29/2012	12:30:46 PM	Helium MFC set to  0.000000
10/29/2012	12:30:46 PM	H2 MFC set to  500.000000
10/29/2012	12:30:46 PM	BCl3 MFC set to  0.000000
10/29/2012	12:30:46 PM	PH3 MFC set to  0.000000
10/29/2012	12:30:46 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:30:46 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:30:46 PM	Tube furnace set to 0
10/29/2012	12:30:47 PM	Helium valve closed
10/29/2012	12:30:47 PM	BCl3 valve closed
10/29/2012	12:30:47 PM	PH3 valve closed
10/29/2012	12:30:47 PM	SiCl4 pre valve closed
10/29/2012	12:30:47 PM	SiCl4 post valve closed
10/29/2012	12:30:47 PM	Main Vac valve closed
10/29/2012	12:30:47 PM	Bypass valve closed
10/29/2012	12:30:47 PM	H2 valve opened
10/29/2012	12:30:47 PM	Bubbler valve opened
10/29/2012	12:30:47 PM	Helium MFC set to  0.000000
10/29/2012	12:30:47 PM	H2 MFC set to  500.000000
10/29/2012	12:30:47 PM	BCl3 MFC set to  0.000000
10/29/2012	12:30:47 PM	PH3 MFC set to  0.000000
10/29/2012	12:30:47 PM	SiCl4 MFC set to  0.000000
10/29/2012	12:30:47 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:30:47 PM	Tube furnace set to 1000
10/29/2012	12:50:47 PM	Helium valve closed
10/29/2012	12:50:47 PM	PH3 valve closed
10/29/2012	12:50:47 PM	Main Vac valve closed
10/29/2012	12:50:47 PM	Bypass valve closed
10/29/2012	12:50:47 PM	H2 valve opened
10/29/2012	12:50:47 PM	BCl3 valve opened
10/29/2012	12:50:47 PM	SiCl4 pre valve opened
10/29/2012	12:50:47 PM	SiCl4 post valve opened
10/29/2012	12:50:47 PM	Bubbler valve opened
10/29/2012	12:50:47 PM	Helium MFC set to  0.000000
10/29/2012	12:50:47 PM	H2 MFC set to  450.000000
10/29/2012	12:50:47 PM	BCl3 MFC set to  1.500000
10/29/2012	12:50:47 PM	PH3 MFC set to  0.000000
10/29/2012	12:50:47 PM	SiCl4 MFC set to  50.000000
10/29/2012	12:50:47 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	12:50:47 PM	Tube furnace set to 1000
10/29/2012	1:10:47 PM	Helium valve closed
10/29/2012	1:10:47 PM	BCl3 valve closed
10/29/2012	1:10:47 PM	PH3 valve closed
10/29/2012	1:10:47 PM	SiCl4 pre valve closed
10/29/2012	1:10:47 PM	SiCl4 post valve closed
10/29/2012	1:10:47 PM	Main Vac valve closed
10/29/2012	1:10:47 PM	Bypass valve closed
10/29/2012	1:10:47 PM	H2 valve opened
10/29/2012	1:10:47 PM	Bubbler valve opened
10/29/2012	1:10:47 PM	Helium MFC set to  0.000000
10/29/2012	1:10:47 PM	H2 MFC set to  500.000000
10/29/2012	1:10:47 PM	BCl3 MFC set to  0.000000
10/29/2012	1:10:47 PM	PH3 MFC set to  0.000000
10/29/2012	1:10:47 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:10:47 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:10:47 PM	Tube furnace set to 950
10/29/2012	1:12:47 PM	Helium valve closed
10/29/2012	1:12:47 PM	BCl3 valve closed
10/29/2012	1:12:47 PM	PH3 valve closed
10/29/2012	1:12:47 PM	SiCl4 pre valve closed
10/29/2012	1:12:47 PM	SiCl4 post valve closed
10/29/2012	1:12:47 PM	Main Vac valve closed
10/29/2012	1:12:47 PM	Bypass valve closed
10/29/2012	1:12:47 PM	H2 valve opened
10/29/2012	1:12:47 PM	Bubbler valve opened
10/29/2012	1:12:47 PM	Helium MFC set to  0.000000
10/29/2012	1:12:47 PM	H2 MFC set to  500.000000
10/29/2012	1:12:47 PM	BCl3 MFC set to  0.000000
10/29/2012	1:12:47 PM	PH3 MFC set to  0.000000
10/29/2012	1:12:47 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:12:47 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:12:48 PM	Tube furnace set to 900
10/29/2012	1:14:48 PM	Helium valve closed
10/29/2012	1:14:48 PM	BCl3 valve closed
10/29/2012	1:14:48 PM	PH3 valve closed
10/29/2012	1:14:48 PM	SiCl4 pre valve closed
10/29/2012	1:14:48 PM	SiCl4 post valve closed
10/29/2012	1:14:48 PM	Main Vac valve closed
10/29/2012	1:14:48 PM	Bypass valve closed
10/29/2012	1:14:48 PM	H2 valve opened
10/29/2012	1:14:48 PM	Bubbler valve opened
10/29/2012	1:14:48 PM	Helium MFC set to  0.000000
10/29/2012	1:14:48 PM	H2 MFC set to  500.000000
10/29/2012	1:14:48 PM	BCl3 MFC set to  0.000000
10/29/2012	1:14:48 PM	PH3 MFC set to  0.000000
10/29/2012	1:14:48 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:14:48 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:14:48 PM	Tube furnace set to 850
10/29/2012	1:16:48 PM	H2 valve closed
10/29/2012	1:16:48 PM	BCl3 valve closed
10/29/2012	1:16:48 PM	PH3 valve closed
10/29/2012	1:16:48 PM	SiCl4 pre valve closed
10/29/2012	1:16:48 PM	SiCl4 post valve closed
10/29/2012	1:16:48 PM	Main Vac valve closed
10/29/2012	1:16:48 PM	Bypass valve closed
10/29/2012	1:16:48 PM	Helium valve opened
10/29/2012	1:16:48 PM	Bubbler valve opened
10/29/2012	1:16:48 PM	Helium MFC set to  500.000000
10/29/2012	1:16:48 PM	H2 MFC set to  0.000000
10/29/2012	1:16:48 PM	BCl3 MFC set to  0.000000
10/29/2012	1:16:48 PM	PH3 MFC set to  0.000000
10/29/2012	1:16:48 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:16:48 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:16:48 PM	Tube furnace set to 800
10/29/2012	1:18:48 PM	H2 valve closed
10/29/2012	1:18:48 PM	BCl3 valve closed
10/29/2012	1:18:48 PM	PH3 valve closed
10/29/2012	1:18:48 PM	SiCl4 pre valve closed
10/29/2012	1:18:48 PM	SiCl4 post valve closed
10/29/2012	1:18:48 PM	Main Vac valve closed
10/29/2012	1:18:48 PM	Bypass valve closed
10/29/2012	1:18:48 PM	Helium valve opened
10/29/2012	1:18:48 PM	Bubbler valve opened
10/29/2012	1:18:48 PM	Helium MFC set to  500.000000
10/29/2012	1:18:48 PM	H2 MFC set to  0.000000
10/29/2012	1:18:48 PM	BCl3 MFC set to  0.000000
10/29/2012	1:18:48 PM	PH3 MFC set to  0.000000
10/29/2012	1:18:48 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:18:48 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:18:48 PM	Tube furnace set to 750
10/29/2012	1:20:48 PM	H2 valve closed
10/29/2012	1:20:48 PM	BCl3 valve closed
10/29/2012	1:20:48 PM	PH3 valve closed
10/29/2012	1:20:48 PM	SiCl4 pre valve closed
10/29/2012	1:20:48 PM	SiCl4 post valve closed
10/29/2012	1:20:48 PM	Main Vac valve closed
10/29/2012	1:20:48 PM	Bypass valve closed
10/29/2012	1:20:48 PM	Helium valve opened
10/29/2012	1:20:48 PM	Bubbler valve opened
10/29/2012	1:20:48 PM	Helium MFC set to  500.000000
10/29/2012	1:20:48 PM	H2 MFC set to  0.000000
10/29/2012	1:20:48 PM	BCl3 MFC set to  0.000000
10/29/2012	1:20:48 PM	PH3 MFC set to  0.000000
10/29/2012	1:20:48 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:20:48 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:20:49 PM	Tube furnace set to 0
10/29/2012	1:40:49 PM	Helium valve closed
10/29/2012	1:40:49 PM	H2 valve closed
10/29/2012	1:40:49 PM	BCl3 valve closed
10/29/2012	1:40:49 PM	PH3 valve closed
10/29/2012	1:40:49 PM	SiCl4 pre valve closed
10/29/2012	1:40:49 PM	SiCl4 post valve closed
10/29/2012	1:40:49 PM	Main Vac valve closed
10/29/2012	1:40:49 PM	Bypass valve closed
10/29/2012	1:40:49 PM	Bubbler valve closed
10/29/2012	1:40:49 PM	Helium MFC set to  0.000000
10/29/2012	1:40:49 PM	H2 MFC set to  0.000000
10/29/2012	1:40:49 PM	BCl3 MFC set to  0.000000
10/29/2012	1:40:49 PM	PH3 MFC set to  0.000000
10/29/2012	1:40:49 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:40:49 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:40:49 PM	Tube furnace set to 0
10/29/2012	1:40:50 PM	Helium valve closed
10/29/2012	1:40:50 PM	H2 valve closed
10/29/2012	1:40:50 PM	BCl3 valve closed
10/29/2012	1:40:50 PM	PH3 valve closed
10/29/2012	1:40:50 PM	SiCl4 pre valve closed
10/29/2012	1:40:50 PM	SiCl4 post valve closed
10/29/2012	1:40:50 PM	Main Vac valve closed
10/29/2012	1:40:50 PM	Bubbler valve closed
10/29/2012	1:40:50 PM	Bypass valve opened
10/29/2012	1:40:50 PM	Helium MFC set to  0.000000
10/29/2012	1:40:50 PM	H2 MFC set to  0.000000
10/29/2012	1:40:50 PM	BCl3 MFC set to  0.000000
10/29/2012	1:40:50 PM	PH3 MFC set to  0.000000
10/29/2012	1:40:50 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:40:50 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:40:50 PM	Tube furnace set to 0
10/29/2012	1:41:51 PM	Helium valve closed
10/29/2012	1:41:51 PM	H2 valve closed
10/29/2012	1:41:51 PM	BCl3 valve closed
10/29/2012	1:41:51 PM	PH3 valve closed
10/29/2012	1:41:51 PM	SiCl4 pre valve closed
10/29/2012	1:41:51 PM	SiCl4 post valve closed
10/29/2012	1:41:51 PM	Main Vac valve closed
10/29/2012	1:41:51 PM	Bubbler valve closed
10/29/2012	1:41:51 PM	Bypass valve opened
10/29/2012	1:41:51 PM	Helium MFC set to  0.000000
10/29/2012	1:41:51 PM	H2 MFC set to  0.000000
10/29/2012	1:41:51 PM	BCl3 MFC set to  0.000000
10/29/2012	1:41:51 PM	PH3 MFC set to  0.000000
10/29/2012	1:41:51 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:41:51 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:41:51 PM	Tube furnace set to 0
10/29/2012	1:42:51 PM	Helium valve closed
10/29/2012	1:42:51 PM	H2 valve closed
10/29/2012	1:42:51 PM	BCl3 valve closed
10/29/2012	1:42:51 PM	PH3 valve closed
10/29/2012	1:42:51 PM	SiCl4 pre valve closed
10/29/2012	1:42:51 PM	SiCl4 post valve closed
10/29/2012	1:42:51 PM	Bypass valve closed
10/29/2012	1:42:51 PM	Bubbler valve closed
10/29/2012	1:42:51 PM	Main Vac valve opened
10/29/2012	1:42:51 PM	Helium MFC set to  0.000000
10/29/2012	1:42:51 PM	H2 MFC set to  0.000000
10/29/2012	1:42:51 PM	BCl3 MFC set to  0.000000
10/29/2012	1:42:51 PM	PH3 MFC set to  0.000000
10/29/2012	1:42:51 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:42:51 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:42:51 PM	Tube furnace set to 0
10/29/2012	1:42:52 PM	Run finished at 1:42 PM
10/29/2012	1:57:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2012	1:57:58 PM	Recipe started at 1:57 PM
10/29/2012	1:57:58 PM	Helium valve closed
10/29/2012	1:57:58 PM	H2 valve closed
10/29/2012	1:57:58 PM	BCl3 valve closed
10/29/2012	1:57:58 PM	PH3 valve closed
10/29/2012	1:57:58 PM	SiCl4 pre valve closed
10/29/2012	1:57:58 PM	SiCl4 post valve closed
10/29/2012	1:57:58 PM	Main Vac valve closed
10/29/2012	1:57:58 PM	Bypass valve closed
10/29/2012	1:57:58 PM	Bubbler valve closed
10/29/2012	1:57:58 PM	Helium MFC set to  0.000000
10/29/2012	1:57:58 PM	H2 MFC set to  0.000000
10/29/2012	1:57:58 PM	BCl3 MFC set to  0.000000
10/29/2012	1:57:58 PM	PH3 MFC set to  0.000000
10/29/2012	1:57:58 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:57:58 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:57:58 PM	Tube furnace set to 0
10/29/2012	1:58:01 PM	H2 valve closed
10/29/2012	1:58:01 PM	BCl3 valve closed
10/29/2012	1:58:01 PM	PH3 valve closed
10/29/2012	1:58:01 PM	SiCl4 pre valve closed
10/29/2012	1:58:01 PM	SiCl4 post valve closed
10/29/2012	1:58:01 PM	Main Vac valve closed
10/29/2012	1:58:01 PM	Bypass valve closed
10/29/2012	1:58:01 PM	Bubbler valve closed
10/29/2012	1:58:01 PM	Helium valve opened
10/29/2012	1:58:01 PM	Helium MFC set to  500.000000
10/29/2012	1:58:01 PM	H2 MFC set to  0.000000
10/29/2012	1:58:01 PM	BCl3 MFC set to  0.000000
10/29/2012	1:58:01 PM	PH3 MFC set to  0.000000
10/29/2012	1:58:01 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:58:01 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:58:01 PM	Tube furnace set to 0
10/29/2012	1:59:13 PM	Helium valve closed
10/29/2012	1:59:13 PM	H2 valve closed
10/29/2012	1:59:13 PM	BCl3 valve closed
10/29/2012	1:59:13 PM	PH3 valve closed
10/29/2012	1:59:13 PM	SiCl4 pre valve closed
10/29/2012	1:59:13 PM	SiCl4 post valve closed
10/29/2012	1:59:13 PM	Main Vac valve closed
10/29/2012	1:59:13 PM	Bypass valve closed
10/29/2012	1:59:13 PM	Bubbler valve closed
10/29/2012	1:59:13 PM	Helium MFC set to  0.000000
10/29/2012	1:59:13 PM	H2 MFC set to  0.000000
10/29/2012	1:59:13 PM	BCl3 MFC set to  0.000000
10/29/2012	1:59:13 PM	PH3 MFC set to  0.000000
10/29/2012	1:59:13 PM	SiCl4 MFC set to  0.000000
10/29/2012	1:59:13 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	1:59:13 PM	Tube furnace set to 0
10/29/2012	1:59:14 PM	Run finished at 1:59 PM
10/29/2012	1:59:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/29/2012	2:00:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2012	2:00:59 PM	Recipe started at 2:00 PM
10/29/2012	2:00:59 PM	Helium valve closed
10/29/2012	2:00:59 PM	H2 valve closed
10/29/2012	2:00:59 PM	BCl3 valve closed
10/29/2012	2:00:59 PM	PH3 valve closed
10/29/2012	2:00:59 PM	SiCl4 pre valve closed
10/29/2012	2:00:59 PM	SiCl4 post valve closed
10/29/2012	2:00:59 PM	Main Vac valve closed
10/29/2012	2:00:59 PM	Bubbler valve closed
10/29/2012	2:00:59 PM	Bypass valve opened
10/29/2012	2:00:59 PM	Helium MFC set to  0.000000
10/29/2012	2:00:59 PM	H2 MFC set to  0.000000
10/29/2012	2:00:59 PM	BCl3 MFC set to  0.000000
10/29/2012	2:00:59 PM	PH3 MFC set to  0.000000
10/29/2012	2:00:59 PM	SiCl4 MFC set to  0.000000
10/29/2012	2:00:59 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	2:00:59 PM	Tube furnace set to 0
10/29/2012	2:02:16 PM	Helium valve closed
10/29/2012	2:02:16 PM	H2 valve closed
10/29/2012	2:02:16 PM	BCl3 valve closed
10/29/2012	2:02:16 PM	PH3 valve closed
10/29/2012	2:02:16 PM	SiCl4 pre valve closed
10/29/2012	2:02:16 PM	SiCl4 post valve closed
10/29/2012	2:02:16 PM	Main Vac valve closed
10/29/2012	2:02:16 PM	Bubbler valve closed
10/29/2012	2:02:16 PM	Bypass valve opened
10/29/2012	2:02:16 PM	Helium MFC set to  0.000000
10/29/2012	2:02:16 PM	H2 MFC set to  0.000000
10/29/2012	2:02:16 PM	BCl3 MFC set to  0.000000
10/29/2012	2:02:16 PM	PH3 MFC set to  0.000000
10/29/2012	2:02:16 PM	SiCl4 MFC set to  0.000000
10/29/2012	2:02:16 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	2:02:17 PM	Tube furnace set to 0
10/29/2012	2:03:17 PM	Helium valve closed
10/29/2012	2:03:17 PM	H2 valve closed
10/29/2012	2:03:17 PM	BCl3 valve closed
10/29/2012	2:03:17 PM	PH3 valve closed
10/29/2012	2:03:17 PM	SiCl4 pre valve closed
10/29/2012	2:03:17 PM	SiCl4 post valve closed
10/29/2012	2:03:17 PM	Bypass valve closed
10/29/2012	2:03:17 PM	Bubbler valve closed
10/29/2012	2:03:17 PM	Main Vac valve opened
10/29/2012	2:03:17 PM	Helium MFC set to  0.000000
10/29/2012	2:03:17 PM	H2 MFC set to  0.000000
10/29/2012	2:03:17 PM	BCl3 MFC set to  0.000000
10/29/2012	2:03:17 PM	PH3 MFC set to  0.000000
10/29/2012	2:03:17 PM	SiCl4 MFC set to  0.000000
10/29/2012	2:03:17 PM	Bypass solenoid MFC set to  0.000000
10/29/2012	2:03:17 PM	Tube furnace set to 0
10/29/2012	2:03:18 PM	Run finished at 2:03 PM
10/29/2012	2:03:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/29/2012	2:08:59 PM	Main Vac valve closed
10/29/2012	2:11:02 PM	Helium valve opened
10/29/2012	2:11:02 PM	Helium valve closed
10/29/2012	2:11:10 PM	Bypass valve opened
10/29/2012	2:11:38 PM	Helium MFC set to  10.000000
10/29/2012	2:11:39 PM	Helium valve opened
10/29/2012	2:11:49 PM	Helium MFC set to  100.000000
10/29/2012	2:11:59 PM	Helium MFC set to  25.000000
10/29/2012	2:12:12 PM	SiCl4 post valve opened
10/29/2012	2:12:24 PM	SiCl4 post valve closed
10/29/2012	2:12:28 PM	Helium valve closed
10/29/2012	2:13:31 PM	SiCl4 post valve opened
10/29/2012	2:13:33 PM	SiCl4 post valve closed
10/29/2012	2:13:35 PM	Helium valve opened
10/29/2012	2:13:38 PM	Helium MFC set to  25.000000
10/29/2012	2:13:40 PM	Helium MFC set to  100.000000
10/29/2012	2:14:30 PM	SiCl4 post valve opened
10/29/2012	2:14:30 PM	SiCl4 post valve closed
10/29/2012	2:15:05 PM	Helium valve closed
10/29/2012	2:15:10 PM	Helium valve opened
10/29/2012	2:15:11 PM	SiCl4 post valve opened
10/29/2012	2:15:12 PM	SiCl4 post valve closed
10/29/2012	2:15:51 PM	SiCl4 post valve opened
10/29/2012	2:15:51 PM	SiCl4 post valve closed
10/29/2012	2:16:10 PM	SiCl4 post valve opened
10/29/2012	2:16:11 PM	SiCl4 post valve closed
10/29/2012	2:17:04 PM	SiCl4 post valve opened
10/29/2012	2:17:05 PM	SiCl4 post valve closed
10/29/2012	2:17:31 PM	SiCl4 post valve opened
10/29/2012	2:17:31 PM	SiCl4 post valve closed
10/29/2012	2:18:10 PM	SiCl4 post valve opened
10/29/2012	2:18:11 PM	SiCl4 post valve closed
10/29/2012	2:18:19 PM	Helium MFC set to  50.000000
10/29/2012	2:18:34 PM	SiCl4 post valve opened
10/29/2012	2:18:35 PM	SiCl4 post valve closed
10/29/2012	2:18:35 PM	SiCl4 post valve opened
10/29/2012	2:18:38 PM	SiCl4 post valve closed
10/29/2012	2:19:11 PM	SiCl4 post valve opened
10/29/2012	2:19:19 PM	SiCl4 post valve closed
10/29/2012	2:19:48 PM	SiCl4 post valve opened
10/29/2012	2:19:59 PM	SiCl4 post valve closed
10/29/2012	2:20:23 PM	SiCl4 post valve opened
10/29/2012	2:20:25 PM	Helium valve closed
10/29/2012	2:20:27 PM	Helium valve opened
10/29/2012	2:20:31 PM	SiCl4 post valve closed
10/29/2012	2:20:32 PM	Helium valve closed
10/29/2012	2:21:02 PM	SiCl4 post valve opened
10/29/2012	2:21:15 PM	Helium valve opened
10/29/2012	2:21:15 PM	Helium valve closed
10/29/2012	2:21:37 PM	SiCl4 post valve closed
10/29/2012	2:21:38 PM	Bypass valve closed
10/29/2012	2:21:42 PM	Helium valve opened
10/29/2012	2:21:44 PM	Helium MFC set to  50.000000
10/29/2012	2:21:50 PM	Helium MFC set to  100.000000
10/29/2012	2:21:58 PM	Helium MFC set to  100.000000
10/29/2012	2:22:01 PM	Helium valve closed
10/29/2012	2:22:48 PM	Helium MFC set to  500.000000
10/29/2012	2:22:55 PM	Helium valve opened
10/29/2012	2:23:03 PM	Helium valve closed
10/29/2012	2:23:04 PM	SiCl4 post valve opened
10/29/2012	2:23:09 PM	Helium valve opened
10/29/2012	2:24:14 PM	Helium valve closed
10/29/2012	2:24:15 PM	SiCl4 post valve closed
10/29/2012	2:24:18 PM	SiCl4 post valve opened
10/29/2012	2:24:20 PM	SiCl4 post valve closed
10/29/2012	2:24:39 PM	Bypass valve opened
10/29/2012	2:26:24 PM	Bypass valve closed
10/29/2012	2:26:35 PM	SiCl4 post valve opened
10/29/2012	2:26:40 PM	Bypass valve opened
10/29/2012	2:27:59 PM	Bypass valve closed
10/29/2012	2:28:00 PM	Main Vac valve opened
10/29/2012	2:29:24 PM	SiCl4 post valve closed
10/29/2012	2:29:40 PM	SiCl4 post valve opened
10/29/2012	2:29:41 PM	SiCl4 post valve closed
10/29/2012	2:29:58 PM	SiCl4 post valve opened
10/29/2012	2:30:08 PM	SiCl4 post valve closed
10/29/2012	2:30:09 PM	Main Vac valve closed
10/29/2012	2:30:15 PM	SiCl4 post valve opened
10/29/2012	2:30:20 PM	Helium valve opened
10/29/2012	2:31:38 PM	Helium valve closed
10/29/2012	2:32:41 PM	Bypass valve opened
10/29/2012	2:42:00 PM	Bypass valve closed
10/29/2012	2:42:01 PM	Main Vac valve opened
10/29/2012	2:46:10 PM	Main Vac valve closed
10/29/2012	2:46:12 PM	Helium valve opened
10/29/2012	2:47:07 PM	Helium valve closed
10/29/2012	2:47:22 PM	Helium valve opened
10/29/2012	2:47:47 PM	Helium valve closed
10/29/2012	2:48:21 PM	SiCl4 post valve closed
10/29/2012	3:28:29 PM	Bypass valve opened
10/29/2012	3:29:31 PM	SiCl4 post valve opened
10/29/2012	3:31:30 PM	Bypass valve closed
10/29/2012	3:31:31 PM	Main Vac valve opened
10/29/2012	3:34:03 PM	SiCl4 post valve closed
10/29/2012	3:34:28 PM	SiCl4 post valve opened
10/29/2012	3:39:32 PM	Main Vac valve closed
10/29/2012	3:39:50 PM	Main Vac valve opened
10/29/2012	3:39:59 PM	Main Vac valve closed
10/29/2012	3:40:16 PM	Main Vac valve opened
10/29/2012	3:42:04 PM	Main Vac valve closed
10/29/2012	3:42:05 PM	Helium valve opened
10/29/2012	3:42:06 PM	Helium valve closed
10/29/2012	3:42:12 PM	Bypass valve opened
10/29/2012	3:43:37 PM	Bypass valve closed
10/29/2012	3:43:40 PM	Main Vac valve opened
10/29/2012	3:53:13 PM	Main Vac valve closed
10/29/2012	3:54:48 PM	Main Vac valve opened
10/29/2012	3:55:10 PM	Main Vac valve closed
10/29/2012	3:55:16 PM	Helium valve opened
10/29/2012	3:56:30 PM	Helium valve closed
10/29/2012	3:56:32 PM	Helium valve opened
10/29/2012	3:56:37 PM	Helium valve closed
10/29/2012	3:56:39 PM	SiCl4 post valve closed
10/29/2012	4:03:18 PM	Bypass valve opened
10/29/2012	4:05:14 PM	Bypass valve closed
10/29/2012	4:05:16 PM	Main Vac valve opened
10/29/2012	4:06:45 PM	Main Vac valve closed
10/29/2012	4:06:56 PM	Main Vac valve opened
10/29/2012	4:08:14 PM	Main Vac valve closed
10/29/2012	4:08:17 PM	SiCl4 post valve opened
10/29/2012	4:08:22 PM	Bypass valve opened
10/29/2012	4:10:58 PM	Bypass valve closed
10/29/2012	4:11:00 PM	Main Vac valve opened
10/29/2012	4:13:49 PM	SiCl4 post valve closed
10/29/2012	4:14:05 PM	SiCl4 post valve opened
10/29/2012	4:14:13 PM	Main Vac valve closed
10/29/2012	4:14:29 PM	Main Vac valve opened
10/29/2012	4:14:33 PM	SiCl4 post valve closed
10/29/2012	4:15:45 PM	Main Vac valve closed
10/29/2012	4:15:47 PM	SiCl4 post valve opened
10/29/2012	4:22:22 PM	Helium valve opened
10/29/2012	4:22:26 PM	Helium valve closed
10/29/2012	4:22:30 PM	Bypass valve opened
10/29/2012	4:25:05 PM	Bypass valve closed
10/29/2012	4:25:06 PM	Main Vac valve opened
10/29/2012	4:25:22 PM	Main Vac valve closed
10/29/2012	4:25:24 PM	SiCl4 post valve closed
10/29/2012	4:25:26 PM	Main Vac valve opened
10/29/2012	4:25:34 PM	Main Vac valve closed
10/29/2012	4:25:36 PM	SiCl4 post valve opened
10/29/2012	4:25:37 PM	Helium valve opened
10/29/2012	4:26:54 PM	Helium valve closed
10/29/2012	4:26:56 PM	Helium valve opened
10/29/2012	4:26:58 PM	Helium valve closed
10/29/2012	4:27:14 PM	SiCl4 post valve closed
10/29/2012	4:30:00 PM	Bypass valve opened
10/29/2012	4:30:01 PM	SiCl4 post valve opened
10/29/2012	4:34:07 PM	Bypass valve closed
10/29/2012	4:34:09 PM	Main Vac valve opened
10/29/2012	5:23:19 PM	SiCl4 post valve closed
10/29/2012	5:23:50 PM	SiCl4 post valve opened
10/29/2012	5:23:59 PM	Main Vac valve closed
10/29/2012	5:24:48 PM	Main Vac valve opened
10/29/2012	5:25:01 PM	Main Vac valve closed
10/29/2012	5:26:09 PM	Helium valve opened
10/29/2012	5:27:28 PM	Helium valve closed
10/29/2012	5:27:30 PM	SiCl4 post valve closed
10/29/2012	5:28:26 PM	Bypass valve opened
10/29/2012	5:28:29 PM	SiCl4 post valve opened
10/29/2012	5:31:24 PM	Bypass valve closed
10/29/2012	5:31:25 PM	Main Vac valve opened
10/29/2012	5:32:20 PM	SiCl4 post valve closed
10/29/2012	5:32:29 PM	SiCl4 post valve opened
10/29/2012	5:32:40 PM	Main Vac valve closed
10/29/2012	5:33:27 PM	Main Vac valve opened
10/29/2012	5:36:47 PM	Main Vac valve closed
10/29/2012	5:36:51 PM	Helium valve opened
10/29/2012	5:38:10 PM	Helium valve closed
10/29/2012	5:38:23 PM	SiCl4 post valve closed
10/29/2012	5:39:45 PM	SiCl4 post valve opened
10/29/2012	5:39:46 PM	SiCl4 post valve closed
10/29/2012	5:46:20 PM	Bypass valve opened
10/29/2012	5:46:22 PM	SiCl4 post valve opened
10/29/2012	5:48:38 PM	Bypass valve closed
10/29/2012	5:48:38 PM	Main Vac valve opened
10/29/2012	5:48:38 PM	Main Vac valve closed
10/29/2012	5:48:49 PM	SiCl4 post valve closed
10/29/2012	5:48:50 PM	Main Vac valve opened
10/29/2012	5:48:56 PM	Main Vac valve closed
10/29/2012	5:49:00 PM	SiCl4 post valve opened
10/29/2012	5:49:20 PM	Main Vac valve opened
10/29/2012	5:51:56 PM	Main Vac valve closed
10/29/2012	5:53:16 PM	SiCl4 post valve closed
10/29/2012	5:53:40 PM	Main Vac valve opened
10/29/2012	5:53:52 PM	SiCl4 post valve opened
10/29/2012	6:03:47 PM	Main Vac valve closed
10/29/2012	6:03:49 PM	Helium valve opened
10/29/2012	6:03:53 PM	Helium valve closed
10/29/2012	6:03:54 PM	Main Vac valve opened
10/29/2012	6:03:58 PM	Main Vac valve closed
10/29/2012	6:03:59 PM	Bypass valve opened
10/29/2012	6:04:17 PM	Bypass valve closed
10/29/2012	6:04:18 PM	Main Vac valve opened
